Impedance Microscope Imaging via Localized Conductivity Modulation

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Solution Overview

Problem

Current microscopic observation methods, such as variable potential transmission, can observe biological samples in solutions with high contrast and resolution without damaging them, but they cannot analyze the sample's composition or provide three-dimensional information.

Innovation Solution

An impedance microscope that measures impedance by applying an AC potential signal to a sample through conductive and insulating thin films, allowing for high-resolution imaging and composition analysis by scanning a physical beam to lower the insulation property of the insulating thin film and guiding the AC signal, enabling the formation of images from impedance values.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If variable potential transmission method is used to observe biological samples, then high contrast and resolution imaging is achieved without electron beam damage, but composition analysis and three-dimensional information are not obtained

Engineering Contradiction:
Improveimaging resolutionVSAvoidcomposition analysis capability
Core Design Contradiction:
Measurement precisionVSLoss of information

Solution Approach 1:

The impedance microscope integrates multiple measurement capabilities (impedance spectroscopy, phase imaging, amplitude imaging) into a single system, enabling both high-resolution structural observation and compositional analysis without requiring separate measurement techniques or sample preparations

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Measurement precision

If electron beam is used for high resolution imaging, then resolution of 10 nm or less is achieved, but sample damage and complex pretreatment are required

Engineering Contradiction:
Improveimaging resolutionVSAvoidelectron beam damage
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent replaces the electron beam-based measurement system with an electrical impedance measurement system using AC potential signals and conductive/insulating thin films, achieving high-resolution imaging through electrical property variations rather than direct electron beam-sample interaction

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Ease of operation

If optical microscope is used for observing organic samples, then simple operation is maintained, but resolution is limited to about 200 nm due to diffraction

Engineering Contradiction:
Improveoperational simplicityVSAvoidimaging resolution
Core Design Contradiction:
Ease of operationVSMeasurement precision

Solution Approach 1:

The patent changes the measurement parameter from optical properties (affected by diffraction limits) to electrical impedance properties, enabling resolution beyond the optical diffraction limit while maintaining operational simplicity through automated AC signal scanning and impedance measurement

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables high-resolution imaging and composition analysis of samples in their native state without pretreatment, allowing for detailed observation and analysis of both two-dimensional and three-dimensional structures.

Implementation Method 1

scanning a physical beam while focusing and irradiating a conductive thin film given to cover a second main surface of the insulating thin film with the physical beam to lower an insulation property of the insulating thin film directly below an irradiation position

Methodology Applied
Scientific EffectElectron beam irradiation effect: Electron Beam

Implementation Method 2

measuring an impedance value by inputting an AC potential signal to the counter electrode, scanning a physical beam while focusing and irradiating a conductive thin film

Methodology Applied
Scientific EffectImpedance measurement: Electrical Impedance Tomography

Data Source

PatentUS11454605B2Image forming method and impedance microscope
Publication Date: 2022.09.27 NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE & TECHNOLOGY
  • US11454605B2 patent drawing
  • US11454605B2 patent drawing
  • US11454605B2 patent drawing

AI summary

An image forming method includes: arranging a sample between a first main surface of an insulating thin film and a counter electrode, measuring an impedance value by inputting an AC potential signal to the counter electrode, scanning a physical beam while focusing and irradiating a conductive thin film given to cover a second main surface of the insulating thin film with the physical beam to lower an insulation property of the insulating thin film directly below an irradiation position, guiding the AC potential signal to the irradiation position, and forming an image from the impedance value corresponding to the irradiation position.