Imprint Apparatus Alignment Detection Overlap
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Solution Overview
Problem
The existing imprint technologies face throughput limitations due to the need for alignment detection system movement, which increases processing time when dealing with peripheral shots on a substrate with varying alignment mark positions.
Innovation Solution
An imprint method and apparatus that allows simultaneous start of resin application and mold pressing after initial alignment scope movement, overlapping movement time with pressing time, and using previously processed shot positions for alignment, enabling efficient alignment and pattern formation across varying shot shapes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the alignment detection system moves to detect alignment marks on peripheral shots, then accurate alignment is achieved, but processing time increases and throughput decreases
Solution Approach 1:
The alignment detection system performs detection of alignment marks on peripheral shots in advance before the actual imprint process. This preliminary detection allows the system to pre-determine which shots require alignment correction, so that during the subsequent imprint cycle, only necessary alignment adjustments are made, reducing overall processing time while maintaining accuracy
Solution Approach 2:
The system continuously monitors and detects alignment marks across all shots including peripheral regions without interrupting the overall imprint workflow. By implementing continuous alignment detection throughout the process rather than discrete stopping points, the system maintains productive flow while ensuring accurate alignment detection
2Measurement precision
If alignment measurement is performed before bringing imprint material into contact with mold, then alignment accuracy is ensured, but the imprint cycle is prolonged
Solution Approach 1:
Alignment measurement and mold contact initiation are overlapped in time. The alignment detection system begins its measurement process while the mold is already moving toward or contacting the substrate, allowing these operations to occur concurrently rather than sequentially, thus reducing total cycle time while preserving alignment accuracy
Solution Approach 2:
The alignment measurement process and the mold pressing process are merged into a single coordinated operation. By synchronizing the alignment detection timing with the mold contact timing, the system performs both functions within the same time window, eliminating the need for separate alignment and pressing cycles
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances throughput by reducing overall processing time and ensuring accurate alignment without prolonging the imprint cycle for peripheral shots, thereby improving the efficiency of microfabrication processes.
Implementation Method 1
After the ultraviolet curable resin is irradiated with ultraviolet light for curing, the cured resin is released from the mold
Data Source
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Figure 2A~2C
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AI summary
The imprint method includes changing the position of a detector that detects an alignment mark formed on a shot on a substrate; bringing a pattern formed on a mold into contact with an imprint material supplied on the shot on the substrate; and detecting the alignment mark using the detector after completion of the change in the position of the detector. Here, the contacting is started prior to completion of the change in the position of the detector.