Imprint Alignment Using Local Resin Viscosity at Mark Regions

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Solution Overview

Problem

Existing imprinting techniques face challenges in accurately aligning molds and substrates due to the mold marks being obscured by the resin, leading to reduced mold lifetime and increased costs, as well as instability in detection signals during the alignment process.

Innovation Solution

The method involves increasing the viscosity of the imprint material at specific positions, including the mark, to a higher level than the pattern region, allowing for clear detection of mold marks and reducing the likelihood of the marks being filled with resin, thereby enhancing alignment accuracy and extending mold lifespan.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the mold mark is filled with resin during imprinting, then the alignment measurement can be performed, but the mold mark cannot be seen and detection becomes impossible

Engineering Contradiction:

Improvealignment measurementVSAvoidmold mark detection

Core Design Contradiction:

Measurement precisionVSDifficulty of detecting and measuring

Solution Approach 1:

The patent applies local quality by creating a viscosity difference between the mark region and pattern region. The imprint material at the mark position has higher viscosity to prevent resin filling, while the pattern region maintains normal viscosity for proper imprinting. This localized property change allows the mold mark to remain visible for detection while still enabling alignment measurement.

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

The patent implements preliminary action by increasing the viscosity of the imprint material at the mark position before the actual imprinting process. This pre-treatment ensures that when the mold is pressed against the substrate, the mark region resists resin infiltration, keeping the mark visible for detection during the alignment measurement phase.

Inventive Principle:

Principle #10Preliminary action

2Difficulty of detecting and measuring

If another substance or material is used for the mark portion, then the mold mark can be observed, but the substance may peel off after washing or repeated imprinting

Engineering Contradiction:

Improvemold mark observationVSAvoidmark durability

Core Design Contradiction:

Difficulty of detecting and measuringVSReliability

Solution Approach 1:

The patent changes the physical parameter of viscosity locally at the mark position. By increasing the viscosity of the imprint material at the mark region, it prevents resin from filling the mark, thereby maintaining mark visibility without requiring alternative materials that could peel off. This parameter change resolves the durability issue while maintaining detectability.

Inventive Principle:

Principle #35Parameter changes

3Difficulty of detecting and measuring

If another substance is used for the mark portion, then the mold mark can be observed, but the cost of the mold increases

Engineering Contradiction:

Improvemold mark observationVSAvoidmold cost

Core Design Contradiction:

Difficulty of detecting and measuringVSEase of manufacture

Solution Approach 1:

The patent uses local quality by modifying only the viscosity property of the imprint material at the mark position, rather than using a completely different material. This approach maintains compatibility with the existing mold structure and imprint material system, avoiding the need for expensive specialized materials while still achieving mark visibility.

Inventive Principle:

Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach improves alignment precision, maintains stable detection signals, and extends the usable life of the mold by preventing resin from filling the mark areas, thus optimizing production efficiency and reducing costs.

Implementation Method 1

increasing viscosity of the imprint material at a predetermined position, which includes a position of a predetermined mark provided on the substrate

Methodology Applied

Scientific EffectViscosity increase:

Data Source

PatentUS12515946B2Imprinting method, pre-processing apparatus, substrate for imprinting, and method for manufacturing substrate

Publication Date: 2026.01.06 CANON KK

AI summary

Provided is an imprinting method suitable for positioning. The imprinting method includes: supplying an imprint material onto a substrate; bringing a patterned portion of a mold into contact with the imprint material, which has been supplied onto the substrate in the supplying of the imprint material, to form a pattern on the imprint material in a predetermined pattern region on the substrate; and increasing viscosity of the imprint material at a predetermined position, which includes a position of a predetermined mark provided on the substrate, other than the pattern region to be higher than viscosity of the imprint material in the pattern region after the supplying of the imprint material and before the bringing of the patterned portion into contact with the imprint material.