Imprint Apparatus Alignment Scope Positioning
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Solution Overview
Problem
The existing imprint apparatuses require extensive time for mold alignment due to the need for prealignment, which reduces throughput, especially when alignment marks on the mold shift and fall outside the scope's field of view.
Innovation Solution
An imprint apparatus with a scope driving mechanism that positions alignment scopes to detect marks on the mold and substrate, calculating positional shifts to perform alignment based on driving amounts, thereby reducing alignment time and improving throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If prealignment of the mold is performed using the alignment scope to detect alignment marks, then alignment accuracy between mold and substrate is improved, but alignment time increases significantly reducing throughput
Solution Approach 1:
The system performs preliminary measurement of the mold's alignment mark position using a sensor before the actual imprint process. This pre-measurement allows the scope to be positioned accurately without time-consuming search movements during alignment, resolving the contradiction by preparing position data in advance while maintaining alignment precision.
Solution Approach 2:
The invention replaces the traditional mechanical scope positioning method (manual or slow automated movement to locate alignment marks) with an electronic positioning system that uses pre-measured position data and a sensor to directly calculate and execute the required scope movement, significantly reducing alignment time while maintaining accuracy.
2Reliability
If the alignment scope maintains a fixed field of view, then the alignment mark on the mold can be detected, but the alignment mark easily falls outside the field of view when molds are changed or shifted
Solution Approach 1:
The system transitions from a static fixed field of view to a dynamic adjustable field of view. The scope's field of view is automatically adjusted based on pre-measured position data of different molds, allowing reliable detection of alignment marks across various mold types and positions while adapting to mold changes without manual intervention.
Solution Approach 2:
The system uses pre-measured position data as feedback to automatically adjust the scope's field of view position. This feedback mechanism ensures that the alignment mark remains within the detectable range regardless of mold changes, maintaining detection reliability while adapting to different mold configurations.
3Measurement precision
If the alignment scope is repositioned to track shifting alignment marks on different molds, then detection capability is maintained, but alignment time increases due to repeated positioning operations
Solution Approach 1:
The system performs preliminary measurement of alignment mark positions for multiple molds in advance. This pre-acquired position information is stored and used to directly calculate scope positioning requirements, eliminating the need for repeated time-consuming search and positioning operations during actual alignment while maintaining accurate mark detection capability.
Solution Approach 2:
The system creates a digital copy (position data) of the alignment mark locations for different molds. This copied position information allows the scope to be positioned accurately without physically searching for marks, significantly reducing alignment time while maintaining detection precision through the use of stored position data.
Data Source
AI summary
The present invention provides an imprint apparatus which forms a pattern in an imprint material on a substrate using a mold, the apparatus including a stage configured to hold the substrate, a holding mechanism configured to hold the mold, a scope configured to detect a mark provided on the mold, a driving mechanism configured to drive the scope to locate the mark provided on the mold within a field of view of the scope, and a processing unit configured obtain a positional shift amount from a reference position of the mold held by the holding mechanism based on a driving amount of the scope required for positioning the scope, and perform alignment between the mold and the substrate based on the positional shift amount.