Imprint Apparatus Convex Substrate Modulation for Partial Field Uniformity
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Solution Overview
Problem
Imprinting partial fields, especially those with less than 50% area coverage, poses challenges due to edge effects and the proximity of template surfaces to substrates without formable material, leading to difficulties in achieving uniform patterns and high yield in semiconductor manufacturing.
Innovation Solution
An imprint apparatus and method that modulate the substrate to create a convex surface, allowing initial contact of the template with formable material spaced apart from the peripheral edge, and utilize gas pressure control to induce a convex curvature, facilitating the spread of formable material like in full field imprinting, particularly for <50% partial fields.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If template surfaces are placed close to substrates without formable material in partial field imprinting, then the imprinting area is maximized, but edge effects increase and pattern uniformity deteriorates
Solution Approach 1:
The substrate is modulated to form a convex curved surface in the region without formable material. This curvature causes the template to initially contact the substrate at a spaced-apart location rather than at the periphery, eliminating direct template-substrate contact at edges and reducing edge effects that degrade pattern uniformity.
Solution Approach 2:
The substrate surface is pre-modulated into a convex shape before the imprinting process begins. This preliminary curvature adjustment ensures that when the template is brought into contact, the initial contact point is automatically positioned away from the periphery, preventing edge effects from affecting pattern formation.
2Manufacturing precision
If gas pressure is increased to induce convex curvature in the substrate, then formable material spreads effectively like in full field imprinting, but the complexity of the apparatus increases
Solution Approach 1:
Gas pressure is applied through gas channels formed in the substrate holder to inflate a bladder or flexible membrane, which in turn modulates the substrate surface into a convex shape. This pneumatic system enables dynamic control of substrate curvature to achieve uniform formable material spread similar to full field imprinting.
Solution Approach 2:
The physical state of the substrate surface is changed from flat to convex by adjusting gas pressure parameters. By controlling the pressure magnitude and distribution in the gas channels, the substrate curvature can be precisely tuned to optimize formable material flow and pattern uniformity.
3Manufacturing precision
If the substrate is modulated to create a convex surface, then initial contact occurs spaced apart from the periphery reducing edge effects, but the device complexity increases
Solution Approach 1:
A bladder or flexible membrane is introduced as an intermediary element between the gas pressure system and the substrate. This mediator converts gas pressure into controlled substrate deformation, enabling convex surface formation without requiring complex direct mechanical modulation mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances the ability to imprint partial fields by ensuring uniform pattern formation and increasing substrate yield, as the formable material spreads effectively, reducing edge effects and improving pattern quality.
Implementation Method 1
utilize gas pressure control to induce a convex curvature
Implementation Method 2
the formable material spreads effectively
Data Source
AI summary
In an embodiment, an imprint apparatus can include a substrate holder having a chucking region and a recessed support section; and a template holder, wherein the chucking region has more area as compared to a template region. In another embodiment, an imprint apparatus can include gas zones; and a gas controller that can be configured to adjust pressures within the gas zones to induce a convex curvature of a partial field of a workpiece used with the imprint apparatus. A method can include providing a workpiece within an imprint apparatus, wherein the workpiece includes a substrate and a formable material; and initially contacting a template with the formable material at a location spaced apart from the periphery of a partial field. In a particular embodiment, the method can further include modulating the substrate to form a convex shape contacting the template with the formable material.