Imprint Apparatus Holding Reliability and Damage Prevention
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Solution Overview
Problem
In imprint apparatuses using photocuring methods, the sudden stress applied during mold release can lead to detachment issues, resulting in reduced throughput, potential damage, and the need for manual intervention, which decreases efficiency and increases the risk of contamination.
Innovation Solution
An imprint apparatus equipped with a mold holding unit, substrate holding unit, detecting unit, and controller that monitors holding operations and determines the feasibility of returning to a normal state, allowing for automated restoration processes to prevent damage and maintain efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the holding force of the substrate stage is increased to prevent detachment, then the reliability of holding is improved, but the risk of damage to the mold or substrate increases
Solution Approach 1:
The system dynamically changes the holding force parameter based on detected abnormality types. When detachment is detected, the holding force is increased to prevent further detachment. When release failure is detected, the holding force is decreased to enable successful release, thus adapting the parameter to different operational conditions
2Reliability
If manual restoration is performed to restore normal state, then the reliability is improved, but the productivity is reduced due to operation stoppage
Solution Approach 1:
The system performs self-restoration by automatically detecting abnormalities and executing appropriate restoration processes. The controller autonomously determines the abnormality type and executes corresponding restoration operations, enabling the system to restore itself without external intervention and maintain continuous operation
Solution Approach 2:
The system uses feedback from the detecting unit to automatically initiate restoration processes. The detection results are fed back to the controller, which then executes appropriate restoration actions, creating a closed-loop control system that maintains device reliability without manual intervention
3Reliability
If manual restoration is performed, then the device state is restored, but the cleanness inside the device may be reduced
Solution Approach 1:
The automated restoration system performs all restoration operations without external intervention, eliminating the need for manual entry into the device. This self-service approach prevents contamination while restoring device functionality, as the entire process occurs automatically within the sealed device environment
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus enhances throughput by enabling automated recovery from holding operation abnormalities, reducing the risk of damage and contamination, and ensuring efficient resumption of operations.
Implementation Method 1
a detecting unit which detects the occurrence of abnormality in a holding operation in the mold holding unit or the substrate holding unit and a position of the mold or the substrate
Implementation Method 2
an imprint material supplied to a shot region on a substrate is irradiated with light and the imprint material is cured in a state in which the imprint material is brought into contact with a mold
Data Source
AI summary
Provided is an imprint apparatus advantageous in terms of throughput. An imprint apparatus which brings an imprint material on a mold substrate into contact with a mold and forms a pattern made of the imprint material includes: a mold holding unit which holds the mold; a substrate holding unit which holds the substrate; a detecting unit which detects the occurrence of abnormality in a holding operation in the mold holding unit or the substrate holding unit and a position of the mold or the substrate; and a controller which performs at least one of the determination concerning whether or not a return process in which a state is returned from a state in which the abnormality of the holding operation has occurred to a normal state is possible and the execution of the return process on the basis of a result of the detection of the detecting unit.