Imprint Apparatus Controller Adjusts Material Volume
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Solution Overview
Problem
Existing imprint techniques face challenges in maintaining the appropriate amount of imprint material on a substrate due to volatility issues, leading to defects in pattern formation when the time between material arrangement and mold contact falls outside a predetermined range or when information for material supply is incorrect.
Innovation Solution
An imprint apparatus with a controller that adjusts the amount of imprint material on a shot region at the time of mold contact, delaying or supplementing the material based on elapsed time to prevent excess or deficiency, ensuring optimal pattern formation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If the imprint material is arranged with consideration to evaporation, then the amount of imprint material can be maintained, but defects still occur when elapsed time falls outside predetermined range or supply information is incorrect
Solution Approach 1:
The controller monitors the actual elapsed time from imprint material arrangement to mold contact and compares it with the predetermined appropriate time range. Based on this feedback, the controller dynamically adjusts the amount of imprint material supplied to ensure the final amount on the shot region is appropriate, even when process variations occur.
Solution Approach 2:
The system transitions from static predetermined supply parameters to dynamic adjustment based on actual process conditions. The controller modifies the imprint material supply amount in real-time based on the measured elapsed time, making the system adaptable to variations in material arrangement timing and mold contact timing.
2Manufacturing precision
If the elapsed time from material arrangement to mold contact is not controlled within a predetermined range, then pattern defects occur, but increasing control complexity
Solution Approach 1:
The controller measures the actual elapsed time between imprint material arrangement and mold contact, compares it with the predetermined appropriate range, and automatically adjusts the material supply amount accordingly. This closed-loop feedback mechanism maintains manufacturing precision without requiring complex external control systems.
Solution Approach 2:
The system uses its own process data (elapsed time measurement) to automatically adjust and correct its material supply parameters. The controller performs self-regulation by detecting deviations from the appropriate time range and compensating through dynamic adjustment of material supply, reducing the need for external intervention or complex control infrastructure.
3Reliability
If the imprint material supply information is set incorrectly, then excess or deficiency of material occurs leading to defects, but frequent adjustments increase processing time
Solution Approach 1:
Instead of using fixed predetermined supply information that requires frequent manual adjustments, the system dynamically determines the appropriate material supply amount based on the actual measured elapsed time for each shot region. This dynamic approach ensures reliability without sacrificing productivity, as adjustments are made automatically and rapidly by the controller.
Solution Approach 2:
The system changes the supply parameters (amount of imprint material) based on the measured elapsed time parameter. When the elapsed time falls outside the appropriate range, the controller modifies the material supply parameter to compensate, ensuring the final material amount remains appropriate without requiring manual intervention or slowing down the process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces defects caused by excess or deficiency of imprint material, ensuring consistent and accurate pattern formation on the substrate by dynamically adjusting the material amount during the imprint process.
Implementation Method 1
the imprint material has volatility, the amount of the imprint material can decrease during the period in which the imprint material is arranged on the substrate until the mold is brought into contact with the imprint material
Data Source
AI summary
An imprint apparatus performs an imprint process by bringing a mold into contact with an imprint material arranged on a shot region of a substrate and curing the imprint material. The apparatus includes a controller configured to execute, in a case where an elapsed time from the supplying of the imprint material to the shot region until the contact with the mold falls outside an allowable range of a predetermined elapsed time, adjustment processing of adjusting an amount of the imprint material on the shot region at the timing of the contact.