Imprint Apparatus Mold Release Detection
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Solution Overview
Problem
In the imprint technique, the release of the mold from the substrate can result in incomplete separation, leading to a state where the substrate sticks to the mold, which is undesirable for continuing the imprint process.
Innovation Solution
An imprint apparatus equipped with a substrate holder, mold holder, driving device, and detector to ensure complete release of the mold by monitoring and adjusting the holding forces and using sensors to detect the completion of the release operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the mold is released from the substrate after imprinting, then the imprint process can proceed to the next step, but the substrate may stick to the mold incompletely, preventing continuation of the process
Solution Approach 1:
The patent employs a detector to monitor whether the substrate has completely separated from the mold after the release operation. This feedback mechanism allows the system to detect the release state and determine whether to proceed with the next imprint cycle, ensuring that the process only continues when complete release is confirmed, thus resolving the contradiction between productivity and reliability.
2Stability of the object's composition
If the holding force on the substrate is increased to prevent sticking, then the substrate remains stable during molding, but the mold cannot be completely released from the substrate
Solution Approach 1:
The patent dynamically adjusts the holding force applied to the substrate based on the process stage. During molding, high holding force maintains substrate stability; during release, the holding force is reduced to enable complete separation. This dynamic control resolves the contradiction between maintaining stability during molding and achieving complete release afterward.
Solution Approach 2:
The system performs a release operation that actively reduces the holding force before attempting to separate the mold from the substrate. This preliminary action of reducing clamping force ensures that the substrate is prepared for complete release, preventing the mold from sticking and enabling process continuation.
3Manufacturing precision
If the mold deforms during release, then the pattern shape on the substrate changes, but increasing holding force to prevent deformation causes incomplete release
Solution Approach 1:
The detector monitors the release completion status, providing feedback that allows the system to verify whether the mold has completely separated from the substrate. This ensures that pattern deformation due to incomplete release is avoided, maintaining manufacturing precision while enabling process continuation when release is successful.
Solution Approach 2:
By dynamically controlling the holding force during the release operation, the system prevents excessive force that would cause mold deformation and pattern distortion, while simultaneously reducing force enough to enable complete release. This resolves the contradiction between pattern accuracy and process continuation.
Data Source
AI summary
The present invention provides an imprint apparatus for performing an imprint process which includes molding of imprint material on a substrate with a mold and releasing of the mold from the molded imprint material, the apparatus including a substrate holder configured to hold the substrate, a mold holder configured to hold the mold, a driving device configured to perform driving, for the releasing of the mold, of at least one of the substrate holder and the mold holder, and a detector configured to detect completion of the releasing of the mold by the driving device.