Imprint Apparatus Bubble Detection and Pressure Control
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Solution Overview
Problem
In imprint apparatuses, air bubbles in the channel can disrupt pressure control, leading to ejection material leakage and substrate contamination, requiring significant downtime for recovery.
Innovation Solution
Incorporating a detection unit to identify bubbles in the channel, coupled with a pressure control system that maintains equal internal pressures in separate storage spaces within the housing unit, preventing leakage by ensuring continuous operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a pressure control system using hydraulic liquid is implemented, then pressure control precision is improved, but bubble generation in the channel occurs leading to control failure
Solution Approach 1:
The detection unit performs preliminary detection of bubbles in the channel before bubbles can disrupt pressure control. By detecting bubbles in advance, the system can take preventive actions (such as activating bubble removal mechanisms or adjusting pressure control parameters) to maintain reliable pressure control throughout the ejection process.
Solution Approach 2:
The detection unit provides real-time feedback about bubble presence in the channel to the pressure control system. This feedback loop enables the system to dynamically adjust pressure control parameters or activate remedial measures when bubbles are detected, thereby maintaining both precision and reliability of pressure control.
2Reliability
If bubble detection and removal mechanisms are added, then pressure control reliability is improved, but device complexity increases
Solution Approach 1:
The detection unit is integrated into the existing pressure control system architecture, serving multiple functions: detecting bubbles, providing feedback for pressure control adjustments, and triggering remedial actions. This multi-functionality approach avoids adding separate independent systems, thereby limiting the increase in device complexity while maintaining reliability improvements.
Solution Approach 2:
The system incorporates automatic bubble detection and removal capabilities that operate autonomously without requiring external intervention. The detection unit automatically identifies bubbles and triggers appropriate removal mechanisms or pressure adjustments, enabling the system to self-correct and maintain reliability without adding complex manual control systems.
3Object-affected harmful factors
If continuous monitoring of bubbles is implemented, then ejection material leakage is prevented, but energy consumption increases
Solution Approach 1:
Instead of continuous monitoring, the detection unit performs periodic bubble detection at critical intervals during the ejection process. This periodic monitoring approach detects bubbles when they are likely to cause leakage (before ejection or during critical phases) while reducing energy consumption compared to continuous monitoring, by activating detection only when needed.
Solution Approach 2:
The detection unit acts as an intermediary between the pressure control system and potential leakage issues. It provides targeted detection at strategic points in the channel where bubbles are most likely to cause problems, enabling preventive action with minimal energy expenditure rather than comprehensive continuous monitoring of the entire system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents ejection material leakage and maintains apparatus functionality by detecting and removing bubbles, reducing downtime and ensuring precise control over the ejection process.
Implementation Method 1
a flexible member provided in the housing unit and separating the housing unit into a first storing space communicating with the ejection head and storing the ejection material and a second storing space storing hydraulic liquid
Implementation Method 2
a pressure control unit configured to control a pressure in the second storing space through the channel
Implementation Method 3
a detection unit configured to detect bubbles in the channel
Data Source
AI summary
An imprint apparatus includes: a movable housing unit; an ejection head provided in the housing unit and configured to eject an ejection material; a flexible member provided in the housing unit and separating the housing unit into a first storing space communicating with the ejection head and storing the ejection material and a second storing space storing hydraulic liquid; a first channel and a second channel communicating with the second storing space; a pressure control unit configured to control a pressure in the second storing space through the channels; and a bubble detection unit configured to detect bubbles in the channels.