Imprint Apparatus Buffer Memory Data Transfer
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Solution Overview
Problem
The existing imprint apparatuses face challenges in achieving high throughput due to the long time required to transfer large driving waveform data for correcting discharge speed and amount, which results in uneven material thickness and pattern deviations on the substrate.
Innovation Solution
The apparatus includes a controller and a discharge controller with a buffer memory that allows for simultaneous transfer of driving waveform data for one shot region while performing the supply step for another, optimizing data transfer and reducing bottlenecks in the imprint process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If high resolution driving waveform data is transferred to the buffer memory for each shot region, then manufacturing precision is improved, but productivity deteriorates due to long transfer time
Solution Approach 1:
The controller transfers driving waveform data for the next shot region in advance while the current shot region is being processed. This preliminary action ensures that high-resolution data is already available in the buffer memory when needed, maintaining pattern accuracy without causing throughput delays
Solution Approach 2:
The data transfer operation continues continuously during the imprint process rather than waiting for completion. The controller overlaps the data transfer for shot region N+1 with the processing of shot region N, ensuring both high precision data transfer and continuous productivity
2Device complexity
If driving waveform data is transferred sequentially for each shot region, then device complexity is reduced, but loss of time increases
Solution Approach 1:
The controller performs data transfer operations continuously without idle periods. While the discharge device processes shot region N, the controller simultaneously transfers data for shot region N+1, eliminating waiting time and reducing overall processing time without adding complex hardware
3Manufacturing precision
If large amount of driving waveform data is transferred, then manufacturing precision is improved, but loss of time increases
Solution Approach 1:
The complete high-resolution driving waveform data for the next shot region is transferred in advance to the buffer memory before it is needed. This preliminary transfer of large data amounts ensures discharge control accuracy is maintained while preventing time loss during actual processing
Solution Approach 2:
The patent introduces a time dimension to the data transfer process by overlapping transfer operations with processing operations. Instead of transferring data only when needed (sequential approach), the system transfers data in parallel with processing, effectively utilizing the time dimension to resolve the contradiction between data amount and transfer time
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the control of data transfer, improving throughput by allowing for real-time adjustments and maintaining pattern accuracy without delays in the imprint process.
Implementation Method 1
a discharge energy generating element (piezoelectric element) included in the nozzle
Data Source
AI summary
An imprint apparatus includes a controller for controlling an imprint process and a supply device for supplying an imprint material. The supply device includes discharge devices to discharge an imprint material, and a discharge controller to control the discharge devices under the control of the controller. The discharge controller includes a buffer memory to temporarily store driving waveform data. Each of the discharge devices includes a discharge element and a driver for driving the discharge element based on the driving waveform data stored in the buffer memory. While a supply step of supplying an imprint material for a first shot region is performed, the controller transfers the driving waveform data for the supply step of a second shot region to a storage area of the buffer memory which is not used in the supply step of the first shot region.