Imprint Apparatus Coating Mechanism Position Control
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Solution Overview
Problem
Conventional imprint apparatuses face challenges in accurately aligning and coating a substrate with resin due to displacement issues, leading to inaccurate application of the resin on the shot region.
Innovation Solution
An imprint apparatus equipped with a measurement device to detect the position of the coating mechanism, a substrate stage for holding the substrate, and a positioning system controlled by a controller to accurately position the substrate based on measurement results, ensuring precise alignment and coating of the resin on the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the coating mechanism is displaced from the designed position, then the alignment between the coating mechanism and shot region deteriorates, but adding a measurement device and positioning system increases device complexity
Solution Approach 1:
The measurement device measures the position of the coating mechanism before the coating process, and the positioning system adjusts the substrate stage position in advance based on the measured data. This preliminary measurement and adjustment ensures that even if the coating mechanism is displaced from its designed position, the alignment accuracy between the coating mechanism and shot region is maintained by pre-compensating for the displacement.
2Manufacturing precision
If a measurement device and positioning system are added to detect and correct coating mechanism position, then alignment accuracy improves, but device complexity and cost increase
Solution Approach 1:
The measurement device continuously monitors the position of the coating mechanism, and the controller receives this measurement data to determine the actual position. The positioning system then adjusts the substrate stage position based on this feedback information, creating a closed-loop control system that automatically compensates for displacement without requiring complex manual intervention.
Data Source
AI summary
An imprint apparatus for coating a substrate with a resin by a coating mechanism, and curing the resin while pressing at least one of the substrate and a mold against the other, includes a measurement device configured to detect a position of the coating mechanism, a substrate stage configured to hold a substrate, a positioning system configured to position the substrate stage, and a controller configured to control positioning of the substrate stage by the positioning system, based on the measurement result.