Imprint Curing Control to Prevent Uncured Resin Carry-Out
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Solution Overview
Problem
Existing imprint techniques face issues with contamination due to uncured composition being carried out, which can contaminate apparatuses and substrates, especially when normal processing is interrupted.
Innovation Solution
A forming apparatus with a control unit that manages two curing units to ensure the curable composition is fully cured before separation from the mold, using a first curing unit while in contact and a second curing unit after separation, preventing uncured composition from being carried out.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the composition is carried out in an uncured state due to processing interruption, then the processing can be stopped, but the apparatus and external storage are contaminated by chemical vaporization
Solution Approach 1:
The system performs preliminary curing action by controlling the first curing unit to cure the composition before it can be carried out. When processing interruption is detected, the control unit activates the second curing unit to complete the curing process, ensuring the composition is in a cured state before any potential carry-out, thus preventing contamination.
Solution Approach 2:
The control unit acts as an intermediary that monitors the processing state and determines whether normal processing can continue. Based on this determination, it coordinates between the application unit, first curing unit, and second curing unit to ensure the composition is properly cured, preventing it from being carried out in an uncured state and causing contamination.
2Manufacturing precision
If the first curing unit cures the composition while the member is in contact, then the composition is cured in place, but additional curing is needed after separation to ensure complete curing
Solution Approach 1:
The curing process is segmented into two distinct stages performed by two separate curing units. The first curing unit performs initial curing while the member is in contact with the substrate, and the second curing unit performs final curing after separation. This segmentation allows each curing unit to be optimized for its specific function, ensuring complete and precise curing while managing system complexity through functional division.
Solution Approach 2:
The two curing units work in sequence to provide continuous curing action. The first curing unit initiates the curing process, and the second curing unit completes it, ensuring the composition is fully cured throughout the entire process. This continuous curing approach prevents processing interruptions that could lead to uncured composition being carried out, while the segmented design manages the complexity of having multiple curing stages.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents contamination by ensuring the composition is fully cured, maintaining apparatus cleanliness and substrate quality.
Implementation Method 1
An imprint apparatus that adopts the photo-curing method forms a pattern on the substrate by shaping a photo-curable composition supplied to a shot area on the substrate with a mold, irradiating the composition with light to cure the composition
Implementation Method 2
irradiating the composition with light to cure the composition
Data Source
AI summary
In a case where it is determined that forming processing can be performed, a curable composition on a substrate is cured by a first curing unit in a state where a member is in contact with the curable composition, the member is separated, and the curable composition is further cured by a second curing unit. In a case where it is determined that the forming processing cannot be performed, the curable composition is cured by the second curing unit in a state where the curable composition is separated from the member without the curable composition being cured by the first curing unit. This can prevent carry-out of the substrate to which an uncured composition is applied and contamination inside and outside an apparatus even in a case where normal processing cannot be performed.