Imprint Apparatus Discharge Control for Precision
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Solution Overview
Problem
In imprint apparatuses, changes in discharge spacing lead to deviations in discharge speed and amount, affecting precision and throughput, especially when high precision is required for forming fine structures on substrates like semiconductor devices.
Innovation Solution
An imprint apparatus with a discharge unit, storage unit, and control unit that selects and adjusts discharge conditions based on discharge spacing to maintain consistent discharge speed and amount, using a library of optimal drive waveforms for each nozzle to minimize the influence of remaining vibration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the discharge spacing of a nozzle is changed to support drop recipe (increase discharge density outside pattern), then the discharge amount and discharge speed deviate due to remaining vibration influence, but maintaining consistent discharge parameters is required for precision
Solution Approach 1:
The patent applies parameter changes by adjusting the drive waveform parameters (amplitude, pulse width, frequency) of the piezoelectric element based on the discharge spacing. When discharge spacing changes, the control unit selects different drive waveform parameters from a pre-stored library to compensate for remaining vibration effects, thereby maintaining consistent discharge amount and speed across different spacing configurations
Solution Approach 2:
The patent implements preliminary action by pre-calculating and storing multiple drive waveforms in a library before actual discharge operations. Each pre-stored waveform is optimized for specific discharge spacing conditions, allowing the system to quickly select the appropriate waveform without real-time calculation, thus maintaining precision while adapting to spacing changes
2Productivity
If fast switching of discharge spacing is implemented to maintain short coating time and throughput, then the number of switches increases when using discharge pattern change methods, but precision control is required
Solution Approach 1:
The patent prepares multiple drive waveforms in advance and stores them in a library, allowing instant retrieval and switching without complex real-time calculations. This preliminary preparation enables fast switching between different discharge spacing configurations while maintaining precision control
Solution Approach 2:
The patent replaces mechanical adjustment methods with electronic control of drive waveform parameters. Instead of physically adjusting nozzle positions or mechanisms, the system electronically switches between pre-programmed waveforms based on discharge spacing requirements, enabling faster and more precise control
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach ensures precise control of discharge speed and amount even with changes in discharge spacing, enhancing the precision and efficiency of the imprinting process, particularly in high-precision applications such as semiconductor manufacturing.
Implementation Method 1
a drive waveform that is applied to a piezoelectric element
Data Source
AI summary
An imprint apparatus, comprises: a discharge unit that discharges a liquid onto a substrate; a storage unit that stores a plurality of discharge conditions for the discharge unit; and a control unit that controls the discharge unit based on a discharge condition that is stored in the storage unit, wherein the control unit selects the discharge condition from the plurality of discharge conditions in accordance with a discharge spacing for discharging the liquid.