Imprint Material Discharging Device with Circulation Filtration

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Solution Overview

Problem

Existing imprint material discharging devices face issues with contamination and gelation of imprint materials over time, leading to reduced patterning precision and potential mold damage due to foreign substances produced in the container section, and the use of filters with small opening diameters causes channel resistance and slows down material supply.

Innovation Solution

An imprint material discharging device with a filter located in a channel connected to the container section, allowing for circulation and filtration of the imprint material without passing through the region between the discharge port and energy generating elements, and a separation membrane to control pressure and maintain the imprint material's properties by separating it from outside air and equipment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a filter with small opening diameter is used to remove foreign substances from imprint material, then the purity of the imprint material is improved, but the channel resistance increases and the material supply speed decreases

Engineering Contradiction:
Improvepurity of imprint materialVSAvoidmaterial supply speed
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The filter is divided into multiple filtration stages with different pore sizes. A first filter with larger pore size removes large foreign substances while maintaining low resistance, and a second filter with smaller pore size removes finer particles. This segmentation allows the system to achieve high purity without excessive channel resistance that would slow material supply.

Inventive Principle:
Principle #1Segmentation

2Manufacturing precision

If the imprint material is circulated and filtered continuously, then the removal of foreign substances is improved, but the risk of gelation and contamination in the container section increases

Engineering Contradiction:
Improveforeign substance removalVSAvoidmaterial stability
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The system performs preliminary filtration before the imprint material enters the container section, removing foreign substances in advance. The circulation path is designed to filter material before storage, preventing gelation and contamination from occurring in the container section during storage periods.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

A circulation pump and filtration system act as intermediaries between the container section and the discharge system. These intermediaries enable continuous filtration without requiring the material to remain static in the container, thus preventing gelation while maintaining foreign substance removal capability.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Duration of action of moving object

If the imprint material is stored for long periods in the container section, then the availability for discharge is improved, but the gelation and contamination of the material increases

Engineering Contradiction:
Improvestorage availabilityVSAvoidmaterial quality
Core Design Contradiction:
Duration of action of moving objectVSManufacturing precision

Solution Approach 1:

The circulation system maintains continuous movement and filtration of the imprint material even during storage periods. This continuous action prevents gelation by keeping the material in constant motion and removes any contaminants that may form during extended storage, thereby maintaining material quality while ensuring availability for discharge.

Inventive Principle:
Principle #20Continuity of useful action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively removes foreign substances and maintains the imprint material's properties, ensuring proper discharge and reducing channel resistance, thereby improving patterning precision and preventing mold damage.

Implementation Method 1

a filter located in a channel connected to the container section

Methodology Applied
Scientific EffectFiltration: Filter (physical)

Implementation Method 2

a separation membrane to control pressure and maintain the imprint material's properties by separating it from outside air and equipment

Methodology Applied
Scientific EffectPhysical containment: Physical Containment

Data Source

PatentEP3076238B1Imprint material discharging device
Publication Date: 2018.08.29 CANON KK
  • EP3076238B1 patent drawingFigure 1~2
  • EP3076238B1 patent drawingFigure 3~4
  • EP3076238B1 patent drawingFigure 5

AI summary

An imprint material discharging device (10) includes a container member (12) that includes a container section (15) that contains an imprint material, a channel that is connected to the container section (15), and a discharging member (11) that includes a discharge port (32) and an energy generating element (29). The channel has a first opening and a second opening, the first opening supplying the imprint material into the channel, the second opening supplying the imprint material supplied from the first opening to the container section (15). A filter that filters the imprint material is disposed between the first opening and the second opening of the channel, and the imprint material supplied into the channel from the first opening is supplied to the container section (15) from the second opening without passing through a region (33) disposed between the energy generating element (29) and the discharge port (32).