Simulation Apparatus for Imprint Droplet Spread Prediction
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing imprint techniques face challenges in consistently forming high-quality patterns due to defects caused by mold pattern differences and manufacturing variations, leading to the need for repeated imprint processes and drop recipe adjustments, which are time-consuming and inefficient, especially in predicting the spread shape of droplets in the periphery of the shot region.
Innovation Solution
A simulation apparatus that predicts the spread shape of boundary droplets in the periphery of the shot region by acquiring droplet placement information and using a prediction unit to differentiate the spread region from the standard droplet region, allowing for accurate and rapid adjustment of drop placement to minimize defects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If fluid flow calculation is used to simulate drop spread shape, then prediction accuracy in periphery region is improved, but calculation time and resource consumption increase
Solution Approach 1:
The substrate is divided into two distinct regions: a first region where drops are surrounded by other drops, and a second region (periphery) where drops are not surrounded. Different prediction methods are applied to each region, allowing accurate simulation of periphery drops without calculating all drops using the resource-intensive fluid flow method.
Solution Approach 2:
Different prediction approaches are used for different spatial locations. The Voronoi diagram method is applied to interior drops where it provides sufficient accuracy, while fluid flow calculation is reserved only for periphery drops where high accuracy is critical. This local differentiation optimizes the balance between accuracy and computational efficiency.
2Manufacturing precision
If repeated imprint processes are performed to correct defects, then pattern quality is improved, but manufacturing time increases
Solution Approach 1:
The spread shape of periphery drops is predicted accurately using fluid flow calculation before the imprint process begins. This preliminary prediction allows for pre-adjustment of the drop recipe to prevent defects, eliminating the need for repeated trial-and-error imprint processes and enabling quality improvement without sacrificing productivity.
3Speed
If Voronoi diagram is used to predict drop spread, then calculation speed is improved, but prediction accuracy in periphery region deteriorates
Solution Approach 1:
The substrate is divided into two distinct regions: a first region where drops are surrounded by other drops, and a second region (periphery) where drops are not surrounded. Different prediction methods are applied to each region, allowing accurate simulation of periphery drops without calculating all drops using the resource-intensive fluid flow method.
Solution Approach 2:
Different prediction approaches are used for different spatial locations. The Voronoi diagram method is applied to interior drops where it provides sufficient accuracy, while fluid flow calculation is reserved only for periphery drops where high accuracy is critical. This local differentiation optimizes the balance between accuracy and computational efficiency.
Data Source
AI summary
Provided is a simulation apparatus configured to, in a process of bringing a member into contact with a plurality of droplets placed on a substrate to form a film of a curable composition on the substrate, highly accurately and rapidly predict spread of boundary droplets located in a boundary region which is a region on the substrate corresponding to at least an edge of the member when the member is contacted. The simulation apparatus includes an acquisition unit configured to acquire information indicating placement of the plurality of droplets on the substrate and a first droplet region which is a predicted region in which each of the droplets spreads around the droplet, and a prediction unit configured to predict, as a second droplet region, a region in which each of the boundary droplets spreads around the boundary droplet in a different way from the first droplet region of droplets other than the boundary droplet in the first droplet region acquired by the acquisition unit.