Imprint Apparatus Dummy Dispensing Resin Adhesion
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Solution Overview
Problem
In imprinting techniques, residual volatile resin components often adhere to apparatus components, leading to pattern defects due to incomplete evacuation, despite existing evacuating mechanisms.
Innovation Solution
An imprint apparatus and method that includes a dispense unit for dummy dispensing of resin onto a receiving unit separate from the substrate, where the dummy dispensed resin is cured using an energy beam without contact with the mold, preventing adherence to apparatus components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If dummy dispensing is performed to prevent ink-jet nozzle clogging, then ink-jet dispensing capability is maintained, but volatile resin components adhere to apparatus components causing pattern defects
Solution Approach 1:
The patent extracts the harmful volatile components from the system by introducing an evacuating mechanism that removes resin vapor from the imprint apparatus chamber, preventing adhesion to substrates and masks while maintaining dummy dispensing operations
Solution Approach 2:
The patent introduces a resin vapor evacuating mechanism as an intermediary system between the ink-jet nozzle and the imprint chamber, which captures and removes volatile components before they can adhere to apparatus components, thus mediating between the need for dummy dispensing and the need to prevent pattern defects
2Object-affected harmful factors
If evacuating mechanism is provided to remove volatile components, then pattern defects are reduced, but incomplete evacuation may still occur causing leakage within the apparatus
Solution Approach 1:
The patent performs preliminary action by conducting dummy dispensing operations before actual imprinting to clear the ink-jet nozzle, and strategically positions the evacuating mechanism to immediately capture and remove volatile components generated during these preliminary operations, preventing their accumulation and subsequent leakage
3Manufacturing precision
If minute droplets of resin are dispensed for pattern forming, then filling property is enhanced, but volatile components are generated that adhere to substrates and masks
Solution Approach 1:
The patent converts the harmful effect of volatile component generation during high-precision dummy dispensing into a benefit by using the evacuating mechanism to actively manage and remove these volatiles, transforming the problem of volatile generation into an opportunity to demonstrate the effectiveness of the evacuation system in maintaining pattern quality
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively prevents resin adherence to apparatus components, reducing pattern defects by ensuring complete curing of dummy dispensed resin without contact with the mold, thereby enhancing the reliability of the imprinting process.
Implementation Method 1
an irradiation unit configured to irradiate an energy beam that cures the imprint material
Data Source
AI summary
An imprint apparatus include: a substrate stage; a dispense unit; an irradiation unit; a receiving unit configured to receive an imprint material that is dummy dispensed from the dispense unit; and a controller configured to cause the dummy dispensed imprint material to be irradiated by an energy beam from the irradiation unit without bringing the dummy dispensed imprint material into contact with the mold.