Imprint Film Simulation Visualization for Fillability Adjustment
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Solution Overview
Problem
Existing film forming techniques require significant time and cost for adjusting imprint conditions to achieve uniform film thickness and prevent bubbles, with current simulation methods failing to effectively guide adjustments due to ineffective reference of simulation results.
Innovation Solution
A simulation apparatus and method that predicts the behavior of a curable composition during film formation, providing a visual simulation image with clear identification of the film edge and outer periphery to assess fillability, allowing for efficient adjustment of imprint conditions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of time
If simulation computation is performed to predict curable composition behavior, then the number of physical evaluation operations can be reduced, but the simulation results are difficult to effectively reference for adjustment
Solution Approach 1:
The patent applies color coding to different regions in the simulation image: the shot region is displayed in one color, the film formation region in another color, and the outer periphery region in a third color. This visual differentiation using color changes makes it immediately apparent whether the curable composition has properly filled the pattern region, enabling effective reference of simulation results for rapid adjustment of imprint conditions.
2Manufacturing precision
If trial and error adjustment using actual apparatus is performed, then imprint conditions can be optimized, but enormous time and cost are required
Solution Approach 1:
The patent creates a visual copy of the actual imprint process through simulation computation. The simulation image reproduces the film formation state with distinct visual indicators for the shot region, film formation region, and outer periphery. This visual copy allows operators to evaluate imprint conditions and make adjustments without performing physical trial and error experiments, significantly reducing adjustment time while maintaining optimization effectiveness.
3Reliability
If detailed observation of pattern formation is performed using microscope, then fillability evaluation is reliable, but the number of operations increases
Solution Approach 1:
The patent replaces the mechanical observation system (microscope) with a computational simulation system. Instead of physically forming films and observing them under microscopes, the system uses simulation computation to predict and display the film formation state. The visual simulation image provides reliable fillability evaluation with immediate feedback, eliminating the need for repeated physical operations while maintaining evaluation accuracy.
Data Source
AI summary
A simulation apparatus predicts a behavior of a curable composition in a formation process in which the curable composition arranged on a shot region of a substrate and a mold are brought into contact with each other to form a film of the curable composition on the shot region. The apparatus includes a processor configured to obtain the behavior of the curable composition by simulation computation, and output data used to display a simulation image simulating the behavior obtained by the simulation computation. The simulation image includes information of an outer periphery of the shot region and information of an edge portion of the film, which are drawn in a mode that enables visual identification of a position of the edge portion of the film with respect to the outer periphery.