Imprint Force Control With Adaptive Disturbance Compensation
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Solution Overview
Problem
Existing control systems for manufacturing apparatuses, such as those used in semiconductor device and MEMS production, face challenges in maintaining accurate control due to disturbance forces applied by feeders and guides, which can lead to suboptimal force application and reduced yield.
Innovation Solution
A control apparatus that includes a driver for applying force to an object, an estimator for calculating an estimated disturbance force based on the object's state, a corrector for adjusting the command value to counteract the disturbance force, and a determiner for determining parameter values for the estimator to enhance accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a feedback corrector with a nominal model is used to estimate disturbance force, then control accuracy is improved, but the system cannot adapt when the vibration isolator state or environment changes
Solution Approach 1:
The patent applies dynamics by making the nominal model adaptive and updateable. The determination unit dynamically adjusts the nominal model parameters based on actual system responses and environmental conditions, transforming a static model into a dynamic one that evolves with changing conditions. This resolves the contradiction by enabling the system to maintain high estimation accuracy while adapting to state or environment changes.
Solution Approach 2:
The system implements self-service through automatic model determination and updating. The determination unit automatically identifies optimal nominal model parameters by analyzing actual system behavior, eliminating the need for manual recalibration. This self-adjusting mechanism maintains accurate disturbance force estimation while adapting to changes autonomously, resolving both accuracy and adaptability requirements.
2Adaptability or versatility
If feeders and guides are added to supply electric power and fluid, then functionality is improved, but disturbance forces are applied to the control object
Solution Approach 1:
The patent applies feedback by using the disturbance observer to continuously monitor and estimate disturbance forces generated by feeders and guides. The estimated disturbance forces are fed back to the control system, which then compensates for these harmful effects. This enables the system to maintain both the functionality of feeders and guides while actively counteracting their negative impact on control accuracy.
Solution Approach 2:
The system converts the harmful disturbance forces from feeders and guides into useful information. By estimating these disturbance forces through the disturbance observer, the system transforms negative effects into compensatable signals. The control apparatus then uses this information to generate counteracting control forces, effectively converting the harmful presence of feeders and guides into an opportunity for enhanced control accuracy through active compensation.
Data Source
AI summary
A control apparatus which controls a force applied to an object, includes a driver configured to apply the force to the object, an estimator configured to estimate, based on information related to a state of the object, an estimated value of a disturbance force to be applied to the object, a corrector configured to correct, based on the estimated value, a command value provided to the driver so as to reduce an influence of the disturbance force, and a determiner configured to execute processing for determining a plurality of parameter values to be used by the estimator to obtain the estimated value based on the information.