Imprint Apparatus Gas Flow Redirection for Material Supply Accuracy
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing imprint apparatuses face challenges in accurately supplying imprint material to the imprint region due to gas streams caused by gas curtains, which can lead to defects and damage, and may not effectively prevent foreign matters from entering the imprint area.
Innovation Solution
The apparatus includes a supplying device with a member featuring a groove structure that redirects gas flows, reducing fluidic resistance and allowing the gas stream to bypass the imprint material supply area, while maintaining an effective gas curtain for foreign matter reduction, ensuring precise material delivery and minimizing foreign matter entry.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a gas curtain is formed to seal the imprint region and reduce foreign matters, then foreign matter prevention is improved, but gas streams may occur beneath the imprint material supplying device causing inaccurate material supply
Solution Approach 1:
The gas supply system is segmented into multiple nozzles positioned at different locations (periphery of mold and beneath supplying device). Each nozzle group serves a specific function: peripheral nozzles create the sealing gas curtain, while the nozzle beneath the supplying device creates a controlled gas stream to prevent foreign matter entry during material supply, resolving the contradiction between sealing effectiveness and material supply accuracy.
Solution Approach 2:
Different gas flow characteristics are applied to different regions: a dense gas curtain is formed at the periphery for sealing, while a controlled gas stream is generated beneath the supplying device to protect the material supply path. This localized differentiation allows simultaneous achievement of foreign matter prevention and accurate material supply.
2Reliability
If the imprint region is sealed with a gas curtain, then foreign matter entry is reduced, but the gas stream may interfere with the imprint material supply process
Solution Approach 1:
The gas supply system is divided into separate nozzle groups: one set at the periphery for creating the sealing curtain, and another set beneath the supplying device for creating a protective gas stream during material supply. This segmentation allows independent control of sealing and material supply protection functions.
Solution Approach 2:
Gas acts as an intermediary substance that serves dual purposes: forming the sealing curtain to exclude foreign matters and creating a controlled stream beneath the supplying device to facilitate smooth material supply. The gas medium mediates between the conflicting requirements of sealing and material supply.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables accurate and efficient supply of imprint material to the target area, reducing defects and damage, while maintaining the effectiveness of the gas curtain in preventing foreign matters, thus improving the quality and precision of pattern formation on substrates.
Implementation Method 1
a sealing device configured to seal the imprint region by forming a flow of gas
Implementation Method 2
a member featuring a groove structure that redirects gas flows, reducing fluidic resistance and allowing the gas stream to bypass the imprint material supply area
Data Source
AI summary
Provided is an imprint apparatus that includes a supplying device configured to supply an imprint material to an imprint region on a substrate; a driving device configured to perform driving for bringing a mold into contact with the imprint material supplied to the imprint region; and a sealing device configured to seal the imprint region by forming a flow of gas, wherein the supplying device includes a member having a surface facing the substrate, an inlet port through which the gas flows into the member and an outlet port through which the gas flows out of the member are formed in the surface, and a flow path for connecting the inlet port with the outlet port is formed in the member.