Imprint Apparatus Condensable Gas Supply System
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Solution Overview
Problem
The existing imprint techniques face challenges with unfilled defects due to trapped bubbles between the mold and resin, requiring extended filling times, which reduces throughput, and the stable supply of condensable gases like pentafluoropropane is hindered by pressure losses and liquefaction issues in gas supply pipes.
Innovation Solution
An imprint apparatus that supplies a condensable gas in a gas state to the space between the mold and resin, using a storage system that keeps the gas in a liquid state and transfers it through a pipe with minimized length to prevent liquefaction, ensuring stable vaporization and delivery to the imprint processor.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the filling time is extended to eliminate unfilled defects caused by trapped air, then the quality of pattern formation is improved, but the throughput of the apparatus is reduced
Solution Approach 1:
The patent changes the physical parameters of the gas environment by introducing a condensable gas with specific properties (high molecular diffusion rate, readiness to dissolve in resin, condensation capability). This parameter change allows the system to achieve both complete filling and rapid cycle times by controlling gas condensation during the release phase rather than extending the filling phase.
Solution Approach 2:
The patent utilizes phase transitions of the condensable gas (between gas and liquid states) to solve the contradiction. The gas condenses during mold pressing to eliminate trapped air quickly, then the condensed gas facilitates easy mold release. This phase transition mechanism enables both high filling quality and high throughput without requiring extended filling times.
2Reliability
If a cleaning filter is disposed in the gas supply pipe to ensure stable gas supply, then the gas purification is improved, but the pressure loss increases causing gas liquefaction in the pipe
Solution Approach 1:
The patent applies preliminary action by introducing the condensable gas into the processing chamber before the pressing operation begins. This allows the gas to be in position and ready to act immediately when pressing starts, eliminating the need for long supply pipes and filters that would cause pressure loss. The gas is prepared in advance at the exact location where it is needed.
Solution Approach 2:
The condensable gas acts as an intermediary substance that mediates between the mold and resin during pressing, and between the mold and cured resin during release. This intermediary function eliminates the need for complex gas supply infrastructure (long pipes, filters) because the gas is introduced directly into the processing space rather than being supplied through lengthy piping systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces unfilled defects and enhances throughput by maintaining the gas in a vapor state during transfer, allowing for efficient pattern filling and reducing resin viscosity, while ensuring stable supply of condensable gases like pentafluoropropane to the imprint processor.
Implementation Method 1
The supply device is configured to supply the condensable gas vaporized in the storage and transferred through the pipe from the storage
Implementation Method 2
condensing the condensable gas trapped between a mold and resin can reduce the filling time and eliminate or reduce an unfilled defect
Implementation Method 3
Hiroshima, Journal of Photopolymer Science and Technology Volume 23, Number 1 (2010), 45-50, reports a phenomenon in which the viscosity of resin is lowered by pentafluoropropane
Data Source
AI summary
An imprint apparatus performs pressing of an imprint material on a substrate with a mold to form a pattern on the substrate. The imprint apparatus includes a supply device configured to supply a condensable gas to a space between the imprint material and the mold. The condensable gas is liquefied by the pressing. The apparatus further includes a pipe for transferring the condensable gas in a gas state to the supply device and a storage connected to the pipe. The storage stores the condensable gas in a liquid state. The supply device is configured to supply the condensable gas vaporized in the storage and transferred through the pipe from the storage.