Imprint Lithography Bit-Patterned Media Templates

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Solution Overview

Problem

In micro-fabrication, existing lithography techniques face challenges in creating high-density patterns with small features, particularly in bit-patterned media, where increasing areal density requires improved anisotropy and reduced interference between magnetic bits, while maintaining thermal stability and writability.

Innovation Solution

The method involves creating templates with concentric and radial line patterns using thin film deposition and frequency increasing techniques, which enhance line frequency and density, allowing for the formation of bit-patterned media with optimized anisotropy and reduced interference by using templates with staggered arrays of magnetic recording islands.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If increasing areal density is pursued in bit-patterned media, then data storage capacity is improved, but interference between magnetic bits increases and thermal stability deteriorates

Engineering Contradiction:
Improveareal densityVSAvoidinterference between magnetic bits
Core Design Contradiction:
Quantity of substanceVSObject-generated harmful factors

Solution Approach 1:

The magnetic recording layer is segmented into discrete magnetic islands arranged in a staggered array pattern, where each island functions as an independent magnetic bit. This segmentation allows high areal density while reducing interference between bits by physically separating them into distinct, isolated magnetic regions rather than a continuous layer.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The staggered array configuration creates local variations in magnetic island spacing and orientation, optimizing the magnetic properties at each location. This local quality variation allows for improved anisotropy and reduced interference in specific regions while maintaining overall high areal density across the recording medium.

Inventive Principle:
Principle #3Local quality

2Quantity of substance

If increasing areal density is pursued in bit-patterned media, then data storage capacity is improved, but thermal stability deteriorates

Engineering Contradiction:
Improveareal densityVSAvoidthermal stability
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

By dividing the magnetic recording layer into discrete islands, each magnetic bit can be thermally isolated from its neighbors. This segmentation prevents thermal interference between adjacent bits, maintaining thermal stability even at high areal densities where bits are closely spaced.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The magnetic islands are formed as composite structures with specific material compositions and layering, creating regions with optimized magnetic anisotropy and thermal properties. This composite structure enables high areal density while maintaining thermal stability through material-specific thermal and magnetic characteristics.

Inventive Principle:
Principle #40Composite materials

3Reliability

If improving anisotropy is pursued in bit-patterned media, then thermal stability is improved, but manufacturing complexity increases

Engineering Contradiction:
ImproveanisotropyVSAvoidmanufacturing complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The staggered array pattern of magnetic islands is pre-formed during the manufacturing process, establishing the optimal geometric configuration before subsequent processing steps. This preliminary structuring simplifies later manufacturing operations while maintaining high anisotropy through the predetermined geometric arrangement.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The manufacturing process utilizes controlled changes in deposition parameters, temperature, and material composition to create magnetic islands with optimized anisotropy. By adjusting these parameters during fabrication, high anisotropy is achieved without requiring overly complex manufacturing procedures.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the creation of high-density bit-patterned media with improved anisotropy, reduced interference, and increased areal density, enhancing data storage capacity and stability in magnetic recording media.

Implementation Method 1

creating templates with concentric and radial line patterns using thin film deposition and frequency increasing techniques

Methodology Applied
Scientific EffectThin film deposition: Physical Vapour Deposition

Data Source

PatentUS8771529B1Method for imprint lithography
Publication Date: 2014.07.08 SEAGATE TECH LLC
  • US8771529B1 patent drawing
  • US8771529B1 patent drawing
  • US8771529B1 patent drawing

AI summary

A method of imprint lithography includes imprinting a first pattern with a first template on a first substrate of a lithographic template. A second pattern is imprinted with a second template on the substrate of the lithographic template. The first pattern and the second pattern at least partially overlap, thus forming a third pattern. The third pattern is lithographically formed on a second substrate with the lithographic template. In an embodiment, the first pattern is a concentric line pattern formed by thin film deposition. In an embodiment, the second pattern is a radial line pattern. In an embodiment the first pattern and the second pattern may have line frequency increased.