Imprint Lithography Template via Inorganic Release Layer
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Solution Overview
Problem
The existing methods for forming imprint templates using electron-beam writing are slow and expensive, limiting the cost-effectiveness and efficiency in achieving smaller feature sizes for lithographic patterns.
Innovation Solution
A method involving a substrate with an inorganic release layer and a layer of imprintable medium, where a master imprint template is used to imprint a pattern into the medium, causing it to solidify, and then etching both layers to form a pattern in the inorganic release layer, thereby creating a patterned imprint template without the need for electron-beam writing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If electron-beam writing is used to form imprint templates, then manufacturing precision is improved, but productivity deteriorates and cost increases
Solution Approach 1:
The patent uses a master imprint template that is replicated multiple times through imprinting onto a substrate with imprintable medium. This copying process allows one high-precision master template to produce multiple identical templates, dramatically increasing productivity while maintaining the manufacturing precision of the master template.
Solution Approach 2:
The template formation process is segmented into two stages: first creating the master template with high precision, then replicating it multiple times through imprinting. This segmentation separates the high-cost precision manufacturing step from the high-volume replication step, resolving the contradiction between precision and productivity.
2Manufacturing precision
If electron-beam writing is used to form imprint templates, then manufacturing precision is improved, but cost deteriorates
Solution Approach 1:
The patent creates a master template through electron-beam writing (expensive but high-precision) and then replicates it multiple times through imprinting (low-cost process). This copying approach allows the high cost of the master template to be amortized over multiple identical templates, significantly reducing the cost per template while maintaining precision.
Solution Approach 2:
The manufacturing process is segmented into a high-cost one-time master template creation and low-cost multiple replications. This segmentation separates the capital expenditure for precision manufacturing from the operational costs of production, making the overall process more cost-effective.
3Ease of manufacture
If organic release layers are used in imprint templates, then ease of manufacture is improved, but reliability deteriorates due to damage susceptibility
Solution Approach 1:
The patent changes the material parameter of the release layer from organic to inorganic materials. This parameter change maintains ease of manufacture through standard deposition processes while dramatically improving reliability and durability against damage, as inorganic materials are inherently more resistant to degradation.
Solution Approach 2:
The patent uses composite material structures combining inorganic release layers with appropriate substrate and imprintable medium layers. This composite approach leverages the durability of inorganic materials while maintaining the functional requirements of the template system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for the cost-effective production of multiple imprint templates with an inorganic release layer, providing improved durability and accuracy, as the inorganic release layer is less susceptible to damage and allows for more precise patterning compared to organic release layers.
Implementation Method 1
The patterning may involve bringing together a patterned surface of an imprint template and a layer of imprintable medium (e.g., moving the imprint template toward the imprintable medium, or moving the imprintable medium toward the imprint template, or both) such that the imprintable medium flows into recesses in the patterned surface and is pushed aside by protrusions on the patterned surface.
Implementation Method 2
Following patterning of the imprintable medium, the imprintable medium is suitably brought into a non-flowable or frozen state (i.e. a fixed state), for example by illuminating the imprintable medium with actinic radiation.
Data Source
AI summary
A method of forming an imprint template using a substrate having an inorganic release layer and a layer of imprintable medium is disclosed. The method includes using a master imprint template to imprint a pattern into the imprintable medium, causing the imprintable medium to solidify, and etching the imprintable medium and the inorganic release layer to form a pattern in the inorganic release layer.