Imprint Lithography Medium Redistribution for Pattern Density
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Solution Overview
Problem
Conventional imprint lithography methods face challenges in efficiently distributing and displacing imprintable medium over substrates with varying pattern densities, leading to longer imprinting times due to the need for uniform medium application and displacement across the substrate surface.
Innovation Solution
The method involves redistributing a flowable imprintable medium using a redistribution stamp or the imprint template itself to create regions of differing volumes corresponding to pattern density, reducing the amount and distance of medium displacement during imprinting, thereby potentially lowering imprinting times.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional uniform imprintable medium application methods are used, then the medium can be applied consistently across the substrate, but the imprinting time increases due to the need to displace medium over the entire substrate surface
Solution Approach 1:
The patent applies local quality by varying the thickness of the imprintable medium in different regions of the substrate to match the pattern density requirements. Areas with higher pattern density receive thinner medium layers, while areas with lower pattern density receive thicker layers. This is achieved through a redistribution stamp with varying thickness features that selectively distributes the medium before template contact, thereby reducing the displacement distance and time in high-density regions while maintaining sufficient medium for low-density regions.
2Reliability
If the imprintable medium is displaced a considerable distance across the substrate surface, then the template can contact the medium uniformly, but the overall imprinting time is lengthened
Solution Approach 1:
The patent applies preliminary action by using a redistribution stamp to pre-distribute and thin the imprintable medium in high pattern density regions before the template contacts the medium. This preliminary redistribution ensures that when the template makes contact, the medium is already positioned at the correct thickness and location, eliminating the need for the template to displace medium over long distances and reducing the overall imprinting time while maintaining reliable contact.
3Productivity
If a redistribution stamp is used to distribute medium before imprinting, then the medium distribution matches pattern density, but the process complexity increases
Solution Approach 1:
The patent applies merging by combining the redistribution stamp function with the template structure itself. The redistribution stamp is designed with features that correspond to the pattern density requirements, and in some embodiments, the template serves dual purposes: first as a redistribution tool and then as the patterning tool. This integration reduces the number of separate components and simplifies the overall process while maintaining the benefits of variable medium distribution.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for more efficient use of imprintable medium, reducing the contact force required for imprinting and shortening imprinting times by matching medium distribution to pattern density variations, enhancing the throughput and accuracy of the lithography process.
Implementation Method 1
redistributing a volume of imprintable medium in a flowable state over a target portion of a surface of a substrate into regions of differing volume
Implementation Method 2
contacting the medium while in the flowable state with the template to form the imprint pattern in the medium
Implementation Method 3
subjecting the medium to conditions to change the medium into a substantially non-flowable state
Data Source
AI summary
An imprinting method is disclosed that involves, in an embodiment, redistributing a volume of imprintable medium in a flowable state over a target portion of a surface of a substrate into regions of differing volume corresponding to regions of differing pattern density of an imprint pattern of a template, contacting the medium while in the flowable state with the template to form the imprint pattern in the medium, subjecting the medium to conditions to change the medium into a substantially non-flowable state, and separating the template from the medium while in the substantially non-flowable state.