Imprint Patterning with Local Pre-Curing for Overlay Accuracy
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Solution Overview
Problem
Conventional imprint apparatuses face challenges in maintaining overlay accuracy between existing and newly formed patterns on a substrate due to distortions, as the mold contacts the imprint material after varying supply amounts, leading to material spreading and difficulty in correcting local distortions.
Innovation Solution
The apparatus employs a controller to manage a first supplying step of imprint material, a first energy supplying step to increase polymerization, a moving step to align the mold and substrate, and a second energy supplying step to solidify the material, allowing for controlled deformation to match pattern regions and improve overlay accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the mold is brought into contact with the imprint material after supplying different supply amounts to respective regions, then the overlay accuracy is improved by compensating for distortion, but the imprint material spreads and planarizes which deteriorates the ability to correct local distortions
Solution Approach 1:
The patent applies preliminary action by increasing the degree of polymerization of the imprint material in specific regions before the mold contacts the material. This is achieved by irradiating predetermined regions with energy (such as light) to partially cure the material, creating localized rigid portions that prevent spreading while maintaining the ability to correct overlay accuracy through controlled polymerization variations.
2Manufacturing precision
If the degree of polymerization is increased in predetermined regions before mold contact, then the imprint material maintains its shape and distortion correction is improved, but additional process steps are required which reduces productivity
Solution Approach 1:
The patent merges the polymerization process with the imprinting process by using the same energy supplying unit to both increase the degree of polymerization in predetermined regions and to solidify the material after molding. This integration allows distortion correction and pattern formation to occur in a unified process sequence, minimizing additional steps and maintaining productivity.
Solution Approach 2:
The patent employs periodic action by using energy supply in distinct phases: first, energy is supplied to increase polymerization in predetermined regions before mold contact; second, the mold contacts the material; third, energy is supplied again to solidify the material after molding. This periodic energy supply enables precise control of the imprinting process while maintaining efficiency through rapid, targeted energy delivery.
3Manufacturing precision
If energy is supplied to increase polymerization before mold contact, then the imprint material resists spreading and maintains pattern fidelity, but energy consumption increases
Solution Approach 1:
The patent applies local quality by selectively increasing the degree of polymerization only in predetermined regions of the imprint material that correspond to areas requiring distortion correction. The energy supplying unit targets specific regions rather than uniformly treating the entire material, thereby maintaining pattern fidelity where needed while minimizing energy consumption in regions where spreading prevention is not required.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach stabilizes pattern formation by adjusting the degree of polymerization and alignment, effectively improving overlay accuracy by conforming the mold and substrate patterns to each other despite distortions.
Implementation Method 1
an energy supplying unit configured to supply energy for increasing a degree of polymerization to the imprint material on the substrate
Data Source
AI summary
The imprint apparatus according to the present invention causes a supplying unit to supply an imprint material onto at least a first region in a predetermined shot region on a substrate, causes an energy supplying unit to supply energy to the imprint material on the first region so as to increase a degree of polymerization of the imprint material on the first region, causes a moving unit to move at least one of a mold and the substrate such that a pattern region formed on the mold and the imprint material on the substrate are brought into contact with each other, and causes the energy supplying unit to supply the energy to the imprint material on the predetermined shot region such that the imprint material on the predetermined shot region is solidified after the pattern region and the imprint material on the substrate are brought into contact with each other.