Imprint Master Template Manufacturing via Back Exposure
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing methods for manufacturing imprint master templates are limited in size, making it difficult to produce large-size panels for display apparatuses like liquid crystal displays, which require precise patterning and alignment to minimize stitch lines and improve display quality.
Innovation Solution
A method involving the formation of a preliminary pattern layer on a base substrate, followed by specific layer patterns and photoresist processes, including back exposure, to create distinct regions for imprinting, allowing for self-alignment and minimizing stitch line size through the use of aluminum layers and negative type photoresist materials.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If conventional imprint lithography is used with limited-size master templates, then manufacturing process is simple, but large-size panel production becomes difficult
Solution Approach 1:
The master template manufacturing process is divided into multiple regions (first region and second region) with distinct patterning approaches. The first region uses conventional imprint lithography while the second region employs a simplified direct patterning method, allowing the overall template to achieve large area coverage while managing process complexity through regional segmentation.
Solution Approach 2:
Different regions of the master template are assigned different pattern densities and structures optimized for their specific functions. The first region contains patterns suitable for imprint lithography demonstration while the second region contains patterns optimized for display application, allowing each region to have locally optimized properties rather than uniform design across the entire large-area template.
2Manufacturing precision
If stitch lines are not minimized in large-area templates, then manufacturing is easier, but display quality deteriorates
Solution Approach 1:
The master template is designed with pre-planned region divisions and pattern arrangements that anticipate the stitching process. By organizing patterns into distinct first and second regions with clear boundaries, the template preparation performs preliminary alignment work that minimizes stitch line visibility during subsequent display panel manufacturing, thereby improving manufacturing precision before actual production begins.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method enables the production of large-area imprint master templates with reduced stitch line size, enhancing the display quality of display apparatuses by ensuring precise patterning and alignment during the imprint process.
Implementation Method 1
forming a second photoresist pattern in the first region by exposing the second photoresist layer by a back exposure process
Data Source
AI summary
A method of manufacturing an imprint master template including forming a first layer pattern only in a partial region and a second layer formed in the entire region, and then a back exposure process is performed.