Imprint Master Template Segmentation for Large-Area Lithography
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Solution Overview
Problem
The existing imprint lithography process faces challenges in manufacturing large-size panels due to the limited size of master templates, which restricts the production of large area imprint resist patterns, particularly for display apparatuses like liquid crystal displays that require precise molecular arrangement control.
Innovation Solution
An imprint master template is designed with multiple fine pattern units arranged in a matrix form, where each unit has a perpendicular and inclined surface configuration, and a supporting part to minimize seam lines and prevent deformation, along with an adhesive forming a convex portion on the upper surface to enhance pattern quality.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If a single large master template is used for imprint lithography, then large area imprint resist patterns can be formed, but manufacturing precision deteriorates due to difficulty in controlling template quality across large areas
Solution Approach 1:
The master template is divided into multiple fine pattern units (first fine pattern unit, second fine pattern unit, etc.), each with its own supporting part. This segmentation allows each unit to be manufactured and quality-controlled independently while maintaining overall template functionality for large area patterning.
2Area of stationary object
If multiple fine pattern units are bonded together to form a large template, then template area increases, but seam lines appear at bonding interfaces reducing pattern quality
Solution Approach 1:
The side surfaces of adjacent fine pattern units are configured asymmetrically with inclined surfaces at predetermined angles. The first fine pattern unit has an inclined surface facing the second fine pattern unit, while the second fine pattern unit has a corresponding inclined surface facing the first. This asymmetric inclined configuration minimizes the formation of harmful seam lines at bonding interfaces.
3Ease of manufacture
If fine pattern units are bonded with flat surfaces, then bonding is simple, but adhesion strength is insufficient leading to template deformation
Solution Approach 1:
The bonding surfaces between fine pattern units are configured as inclined surfaces rather than flat surfaces. This curved/angled configuration increases the bonding area and improves adhesion strength, preventing template deformation while maintaining manufacturing feasibility.
4Ease of manufacture
If the side surfaces of fine pattern units are perpendicular only, then manufacturing is simple, but seam lines form at bonding interfaces
Solution Approach 1:
While maintaining perpendicular surfaces for ease of manufacture, the patent introduces inclined surfaces at predetermined angles on the side surfaces of fine pattern units. This asymmetric configuration with both perpendicular and inclined surfaces reduces seam line formation at bonding interfaces while remaining manufacturable.
Data Source
AI summary
An imprint master template including a first fine pattern unit having an upper surface on which a fine pattern is formed, a second fine pattern unit disposed adjacent to the first fine pattern unit and having an upper surface on which a fine pattern is formed, and a supporting part configured to support the first fine pattern unit and the second fine pattern unit. A side surface of the first fine pattern unit faces a side surface of the second fine pattern unit. The side surface of the first fine pattern unit includes a first surface which is perpendicular to the upper surface and a second surface which is inclined at a predetermined angle with respect to the first surface. The side surface of the second fine pattern unit includes a first surface which is perpendicular to the upper surface and a second surface which is inclined at a predetermined angle with respect to the first surface.