Imprint Lithography Mold Alignment for Display Panel Patterning
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Solution Overview
Problem
The photolithography process for manufacturing liquid crystal display panels is time-consuming and costly due to its complex steps, such as deposition, exposure, development, and etching, which increases manufacturing time and costs.
Innovation Solution
An apparatus and method using imprint lithography with a mold and alignment keys to pattern thin films without the need for photolithography, involving a mold with pattern forming parts and alignment keys, and a non-transparent film for accurate alignment and hardening of organic films, allowing for efficient and accurate patterning of display panels.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If photolithography process is used for patterning thin films, then manufacturing precision can be achieved, but manufacturing time and cost increase due to complex steps including deposition, exposure, development, and etching
Solution Approach 1:
The patent extracts and eliminates the complex photolithography steps (exposure, development, etching) by replacing them with a direct imprinting process. The mold directly transfers the pattern to the organic film through pressing, removing the intermediate chemical processing steps while maintaining patterning precision.
Solution Approach 2:
The patent replaces the optical-chemical system of photolithography with a mechanical imprinting system. The mold physically presses the pattern into the organic film, substituting the optical exposure and chemical development processes with a straightforward mechanical deformation process that achieves the same patterning result more efficiently.
2Manufacturing precision
If photolithography process is used for patterning thin films, then pattern accuracy can be achieved, but device complexity and manufacturing cost increase due to multiple process steps
Solution Approach 1:
The patent merges multiple separate process steps (deposition, exposure, development, etching) into a single integrated imprinting operation. The mold contains the pattern directly, allowing all patterning functions to be performed in one pressing action, thereby reducing process complexity while maintaining pattern accuracy.
Solution Approach 2:
The patent performs the patterning action in advance by pre-forming the pattern on the mold itself. The mold is prepared with the desired pattern structure before the imprinting process, allowing the pattern to be transferred directly to the organic film without requiring subsequent exposure, development, or etching steps.
3Manufacturing precision
If photolithography process is used for patterning, then thin film patterns can be formed, but manufacturing cost increases due to expensive equipment and multiple process steps
Solution Approach 1:
The patent employs a mold that can be manufactured relatively inexpensively compared to photolithography equipment. The mold serves as a reusable but simple tool that transfers the pattern through mechanical pressing, eliminating the need for expensive photolithography equipment while achieving the same patterning result.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces manufacturing time and costs by eliminating the need for exposure and development processes, enabling efficient and accurate patterning of display panels using imprint lithography.
Implementation Method 1
an alignment sensor which is positioned under the arriving part and which determines whether the display panel and the mold are erroneously aligned, through the light transmitting part
Implementation Method 2
hardening the organic film
Data Source
AI summary
An apparatus for manufacturing a display panel includes an arriving part in which an unfinished display panel is disposed. The apparatus has at least one light transmitting part, a mold which is positioned on the arriving part and which includes at least one alignment key and a pattern forming part, a mold driver which drives the mold, and an alignment sensor which is positioned under the arriving part and which determines whether the display panel and the mold are erroneously aligned through the light transmitting part. Therefore, it is possible to efficiently and accurately pattern a specific material onto the display panel through an imprint lithography process using a pressing mold.