Imprint Appar Mold Alignment Driver Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing imprint apparatuses face challenges in achieving high throughput due to the viscosity of the imprint material, which impedes precise alignment and position changes between the mold and substrate during the imprint process.
Innovation Solution
An imprint apparatus equipped with a driver, measurement device, and controller that combines first signals for position deviation with second signals that increase driving force over time intervals to efficiently align and position the mold and substrate, allowing for effective alignment and pattern transfer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the mold and substrate are aligned in a state of contact due to imprint material viscosity, then alignment precision is maintained, but throughput deteriorates due to difficulty in changing relative position
Solution Approach 1:
The patent applies preliminary action by performing alignment in a non-contact state before the imprint material is applied between the mold and substrate. The controller controls the driver to change the relative position based on a signal that increases driving force, achieving precise alignment before contact occurs. This prevents the viscosity of the imprint material from hindering position adjustment, thereby maintaining alignment precision while improving throughput.
2Speed
If the driving force is increased to overcome viscosity during alignment, then position change speed improves, but control precision deteriorates
Solution Approach 1:
The patent applies periodic action by using a signal with time intervals that momentarily increases the driving force of the driver. The controller generates this periodic signal to enable rapid position changes when needed, while maintaining precise control during alignment. This allows the system to achieve both high speed position adjustment and precise alignment control by applying increased driving force only during specific time intervals.
Solution Approach 2:
The patent applies dynamics by making the driving force variable through the controller, which adjusts the driving force based on the alignment state and position deviation. The system transitions from a static driving force to a dynamic one that adapts to the alignment requirements, enabling both rapid position changes and precise alignment control depending on the operational phase.
Data Source
AI summary
The present invention provides an imprint apparatus which forms a pattern of an imprint material on a substrate by using a mold, the apparatus comprising: a driver configured to drive the mold and the substrate relatively; a measurement device configured to measure a relative position between the mold and the substrate; and a controller configured to, in alignment between the mold and the substrate, control the driver based on a signal obtained by combining, with a first signal according to a deviation between the relative position measured by the measurement device and a target relative position, second signals with time intervals therebetween and that momentarily increase a driving force of the driver.