Imprint Apparatus Mold Alignment Control via Force Balance
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Solution Overview
Problem
Existing imprint apparatuses face challenges in maintaining pattern accuracy due to limitations in drive mechanism outputs, leading to unbalanced resultant forces and moments, which can cause mold misalignment during shape and magnification correction.
Innovation Solution
The imprint apparatus incorporates a control unit that adjusts a shape coefficient multiplied by correction amounts to balance resultant forces and moments using closed-loop control, ensuring that correction command values remain within the output limits of actuators, thereby preventing mold misalignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If multiple actuators apply force to correct mold shape and magnification, then pattern accuracy is improved, but actuator output limits cause imbalance in resultant force and moment leading to mold position shift
Solution Approach 1:
The control unit calculates correction amounts based on actual overlay errors detected between the mold pattern and substrate pattern, and applies feedback control to adjust actuator outputs. This ensures that while correcting pattern accuracy, the system maintains balance in resultant forces and moments by continuously monitoring and adjusting based on actual performance, preventing mold position shift.
Solution Approach 2:
The control unit dynamically adjusts the output parameters of multiple actuators by calculating appropriate correction amounts for each actuator based on overlay errors. By changing the force parameters applied by each actuator in a coordinated manner, the system achieves pattern correction while maintaining force balance to prevent mold position shift during the imprint process.
2Manufacturing precision
If actuator output is increased to improve shape correction capability, then mold shape accuracy is improved, but the lower limit of actuator output (inability to generate negative force) causes loss of force balance
Solution Approach 1:
The control unit dynamically adjusts actuator outputs based on real-time overlay error measurements, transitioning the system from static to dynamic control. By continuously adapting the force applied by each actuator according to actual performance, the system achieves accurate shape correction while maintaining force balance, avoiding the need for complex mechanical structures that could generate negative forces.
3Manufacturing precision
If multiple drive mechanisms are combined to correct both magnification and shape, then overall pattern accuracy is improved, but the interaction between mechanisms causes unbalanced resultant force and moment
Solution Approach 1:
The control unit serves multiple functions by simultaneously calculating correction amounts for both magnification and shape errors, and coordinating the outputs of multiple actuators. This multi-functional control approach enables the system to achieve overall pattern accuracy while maintaining force and moment balance through unified control of all drive mechanisms.
Solution Approach 2:
The control unit uses feedback from overlay error measurements to coordinate the operation of multiple drive mechanisms. By calculating appropriate correction amounts for each mechanism based on actual errors and adjusting their outputs accordingly, the system achieves accurate pattern transfer while maintaining balance in resultant forces and moments.
Data Source
AI summary
Provided is an imprint apparatus which reduces a shift of a mold from a desired position. The imprint apparatus that forms a pattern of an imprint material on a substrate using a mold includes a correction mechanism which corrects a shape and a magnification of the mold, and a control unit which controls the correction mechanism on the basis of a difference in shape and magnification between the mold and the substrate. The control unit changes a shape coefficient multiplied by a correction amount of the shape to balance a resultant force and a moment on the mold applied by the correction mechanism on the basis of a magnification coefficient, which is a coefficient multiplied by a correction amount of the magnification through closed-loop control.