Imprint Mold Filling Sequence for Bubble-Free Pattern Transfer
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Solution Overview
Problem
Existing imprint techniques face challenges in reducing bubbles in the composition between the mold and substrate, leading to defects in the formed pattern, especially when the mold is brought into contact with the composition while facing downward.
Innovation Solution
An imprint method involving a series of steps including filling the concave portion of the mold with uncured composition, separating the mold, integrating it with the substrate composition, and then curing it to minimize bubble formation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the mold is brought into contact with the composition on the substrate while the concave-convex pattern faces downward, then the imprint process can be performed with the mold in the conventional position, but bubbles remain in the composition between the mold and substrate causing defects in the formed pattern
Solution Approach 1:
The patent applies inversion by flipping the mold orientation from the conventional downward-facing concave-convex pattern to an upward-facing pattern. This allows the composition to be supplied to the mold first, then the substrate is brought into contact, which eliminates bubble entrapment while maintaining ease of operation through the two-stage contact method
2Manufacturing precision
If the composition is directly supplied to the concave-convex pattern of the mold while the pattern faces upward, then bubbles in the composition are reduced, but this method is difficult to apply when the mold must face downward as in conventional imprint techniques
Solution Approach 1:
The patent segments the contact process into two distinct stages: first contact between the mold and composition (allowing bubble-free filling), then contact between the substrate and the composition-filled mold. This segmentation enables the upward-facing mold configuration to be combined with conventional substrate processing, making the method adaptable to existing imprint systems
3Productivity
If the mold is brought into contact with the composition on the substrate in a single step, then the process is simple and fast, but bubbles remain trapped in the composition causing unfilled defects
Solution Approach 1:
The patent applies preliminary action by first bringing the mold into contact with the composition to fill the concave portions before introducing the substrate. This preliminary filling step ensures that bubbles are expelled during the initial contact phase, and the pre-filled mold is then pressed against the substrate to transfer the pattern without introducing new bubbles, thus maintaining both speed and quality
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method effectively reduces bubble-related defects, ensuring accurate pattern formation on the substrate by minimizing gas retention during the imprint process.
Implementation Method 1
the concave portion of the concave-convex pattern of the mold is filled with the composition due to a capillary force or the like
Data Source
AI summary
An imprint method of forming a patterned composition on a shot region of a substrate by using a mold having a concave-convex pattern includes filling a concave portion of the concave-convex pattern of the mold with a first composition by bringing the mold into contact with the first composition on a predetermined region and then separating the mold from the predetermined region in a state in which the first composition on the predetermined region is uncured. The mold having undergone the filling is brought into contact with a second composition on the shot region, thereby integrating the first composition filling the concave portion of the concave-convex pattern of the mold with the second composition on the shot region to form an integrated composition. The integrated composition is cured to form the patterned composition and separated from the mold.