Imprint Mold Magnification Correction for Precise Pattern Overlap
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Solution Overview
Problem
Imprint apparatuses face challenges in achieving high precision magnification correction due to limitations in actuator stroke and alignment errors, leading to degraded overlapping accuracy during the transfer of patterns from molds to substrates, especially in nanoimprint processes.
Innovation Solution
The apparatus incorporates a magnification correction mechanism with actuators applying force to the mold via a contact member, and a displacement member adjustable by fluid pressure to correct mold shape and position, allowing for precise alignment and deformation control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a piezo actuator with high driving resolution is employed to achieve high precision magnification correction, then overlapping accuracy is improved, but the actuator stroke is limited and it is difficult to obtain large strokes without changing the size of the apparatus
Solution Approach 1:
A displacement member is introduced as an intermediary component between the actuator and the mold. The actuator drives the displacement member, which in turn adjusts the initial position of the contact member that applies force to the mold. This mediator allows the actuator to achieve its full stroke while still providing the necessary adjustment range for the mold, resolving the contradiction between limited actuator stroke and the need for large adjustment range.
Solution Approach 2:
The system separates the adjustment function into two dimensions: the actuator provides high-precision positioning in one dimension (driving the displacement member), while the displacement member provides the stroke extension in another dimension (adjusting the initial position of the contact member). This dimensional separation allows both high precision and large stroke to be achieved simultaneously.
2Adaptability or versatility
If a gap is provided between the pressing unit of the magnification correction mechanism and the mold when exchanging molds, then mold exchangeability is improved, but alignment errors increase and overlapping precision is degraded
Solution Approach 1:
The displacement member performs preliminary action by adjusting the initial position of the contact member before the magnification correction process begins. This preliminary positioning compensates for alignment errors that would otherwise occur due to the gap needed for mold exchange, allowing the contact member to start from the correct position even when molds are exchanged with calculation errors.
3Length of moving object
If the contact member is disposed on the opposing side of the wafer to achieve high strokes, then actuator stroke is improved, but the configuration becomes complex and the apparatus size increases
Solution Approach 1:
The displacement member is nested within the existing magnification correction mechanism structure. Instead of adding a separate external mechanism on the opposing side of the wafer, the displacement member is integrated into the contact member assembly, allowing it to extend the actuator stroke while maintaining a compact configuration that does not significantly increase apparatus complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances overlapping precision by compensating for mold shape errors and alignment issues, ensuring accurate pattern transfer with improved accuracy and reduced apparatus complexity.
Implementation Method 1
a displacement member displaceable by fluid pressure for changing an initial position for starting correction of the contact member of the magnification correction mechanism
Implementation Method 2
a magnification correction mechanism including an actuator that applies a force to a side of the mold via a contact member in order to correct a shape of a patterned portion
Data Source
AI summary
[Problem] The provision of an imprint apparatus that is beneficial in improving the overlap precision of a mold and resin on a substrate.[Method for Solving the Problem] In an imprint apparatus, which is configured so as to transfer a pattern from a mold onto a resin surface by pressing the mold onto the resin that is disposed on the substate surface, has a magnification correction mechanism including actuators for applying a force to a side of the mold via a contact member, and correcting the shape of a patterned portion that has been formed on the mold; and displacement members displaceable by fluid pressure for changing an initial position for starting correction of the contact members of the magnification correction unit according to a size of the mold.