Imprint Mold Shape Correction Using Master Reference Marks
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Solution Overview
Problem
Existing imprint techniques face challenges in accurately correcting the shape of molds without increasing costs or reducing productivity, particularly when alignment marks are not formed on the substrate, and are prone to chucking errors during reference substrate conveyance.
Innovation Solution
An imprint apparatus with an adjustment unit and control unit that corrects the mold shape based on usage data, using reference marks on both the mold and substrate to align and adjust the mold's shape, thereby maintaining productivity without the need for additional alignment marks on the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If alignment marks are formed on the substrate to measure relative position, then measurement precision is improved, but manufacturing cost increases
Solution Approach 1:
The invention uses the master mold itself as a reference for position measurement, copying its pattern information to the substrate without requiring separate alignment marks. The master mold's micropattern serves as both the object to be transferred and the reference for measuring relative position, eliminating the need for additional mark-forming steps
Solution Approach 2:
The master mold serves multiple functions: it acts as both the pattern source for creating the micropattern and as the reference object for measuring relative position between mold and substrate. This multi-functionality eliminates the need for separate alignment marks while maintaining measurement capability
2Measurement precision
If reference substrate is conveyed for position measurement, then relative position can be measured, but productivity decreases
Solution Approach 1:
The invention combines the position measurement function with the existing master mold, eliminating the need for a separate reference substrate. By using the master mold itself as the reference, the measurement process is integrated into the existing manufacturing flow without requiring additional substrate conveyance steps
Solution Approach 2:
The invention extracts the reference function from a separate reference substrate and integrates it directly into the master mold. This eliminates the need for conveying a separate reference substrate while maintaining the capability to measure relative position
3Manufacturing precision
If master mold shape is corrected using reference substrate, then manufacturing precision is improved, but chucking errors are introduced
Solution Approach 1:
The invention uses the master mold's own micropattern as the reference information, copying it to the substrate during the imprint process. This eliminates dependency on external reference substrates that may introduce chucking errors, as the reference is inherent to the master mold itself
Data Source
AI summary
An imprint apparatus for performing an imprint process of forming a pattern of an imprint material on a substrate using a mold includes a mold holding unit that holds the mold, a stage that holds the substrate, a measurement unit that measures marks on the mold or the stage, a driving unit that brings the mold and the substrate into contact, a curing unit that cures the imprint material, and a control unit that controls various steps of the imprint process. The control unit obtains information about a difference between first and second position shift amounts obtained by measuring marks on the mold and substrate before and after performing a first imprint process, respectively. The control unit also controls the imprint apparatus to perform a second imprint process, following the first imprint process, based on the obtained information about the difference from performing the first imprint process.