Imprint Mold Deformation Calibration for Pattern Transfer Accuracy
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Solution Overview
Problem
In the imprint technique, variations in mold thickness due to manufacturing errors lead to inconsistent pattern transfer across molds, resulting in dimension and shape variations of the pattern on the substrate, and potential loss of the transferred pattern.
Innovation Solution
An imprint apparatus with a deforming unit, measuring unit, control unit, calculation unit, and calibration unit that measures and calibrates the deformation amount of the mold's pattern surface to apply a controlled force, ensuring accurate pattern transfer by adjusting the pressure in the chamber based on the mold's thickness and desired deformation amount.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a predetermined force is applied to each mold to deform each mold in the same amount, then the imprint process can be standardized, but variation in mold thickness causes variation in deformation amount and pattern transfer accuracy
Solution Approach 1:
The patent applies parameter changes by adjusting the deformation amount of each mold based on its individual thickness measurement. Instead of using a uniform force for all molds, the system varies the deformation parameter (displacement amount) according to each mold's specific thickness, thereby compensating for manufacturing variations and achieving consistent pattern transfer accuracy across all molds
Solution Approach 2:
The patent implements feedback control by measuring the actual thickness of each mold and using this information to adjust the deformation amount accordingly. The measurement result feeds back into the control system, which then modifies the imprinting parameters to compensate for thickness variations, ensuring that each mold produces patterns with the required precision despite manufacturing tolerances
2Ease of operation
If the same force is applied to all molds, then the operation process is simple, but the deformation amount varies due to thickness variation, causing pattern dimension and shape variations
Solution Approach 1:
The patent applies preliminary action by measuring and recording the thickness of each mold before the imprinting process. This pre-measurement information is stored and used to determine the appropriate deformation amount for each specific mold, allowing the system to automatically compensate for thickness variations during operation without requiring complex real-time adjustments or manual intervention
Solution Approach 2:
The system changes the deformation parameter based on each mold's measured thickness. By adjusting the displacement amount according to individual mold characteristics, the system maintains pattern dimension and shape consistency across all molds while keeping the operational process relatively simple through automated parameter selection
3Ease of manufacture
If mold thickness varies due to manufacturing errors, then producing molds is easier and more cost-effective, but the deformation amount and pattern transfer accuracy vary across individual molds
Solution Approach 1:
The patent applies self-service by enabling each mold to effectively compensate for its own manufacturing variations. Through individual thickness measurement and corresponding adjustment of deformation amount, each mold adapts to its specific characteristics, ensuring that pattern transfer accuracy is maintained despite variations in mold thickness caused by manufacturing tolerances
Solution Approach 2:
The system changes the deformation parameter for each mold based on its measured thickness, allowing molds with different thicknesses to all achieve the required pattern transfer accuracy. This approach maintains ease of mold manufacture while compensating for thickness variations through parameter adjustment
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus ensures consistent pattern transfer accuracy across molds with varying thicknesses by calibrating the force applied to the mold, maintaining the target deformation amount and preventing pattern loss during the imprint process.
Implementation Method 1
a deforming unit configured to deform the pattern surface by applying a first force to the mold
Implementation Method 2
a first measuring unit configured to measure a deformation amount of the pattern surface
Implementation Method 3
a calibration unit configured to calibrate a first control profile describing a time in the imprint process, and a first force to be applied to the mold by the deforming unit, based on the rate of change in deformation amount
Data Source
AI summary
The present invention provides an imprint apparatus comprising a deforming unit configured to deform a pattern surface by applying a force to a mold, a measuring unit configured to measure a deformation amount of the pattern surface, a control unit configured to control the measuring unit to measure the deformation amount in each of a plurality of states in which a plurality of the forces are applied to the mold, a calculation unit configured to calculate a rate of change in the deformation amount as a function of a change in the force applied to the mold, and a calibration unit configured to calibrate a control profile describing a time in the imprint process, and the force applied to the mold, based on the rate of change in the deformation amount.