Imprint Mold Holder Regulation With a Limiting Surface
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Solution Overview
Problem
The imprint process in semiconductor manufacturing is affected by transient temperature variations in the holding member of the mold, leading to inconsistencies in overlay accuracy and potential damage due to increased heat generation and bounce during idle states, which can cause mold or substrate damage.
Innovation Solution
An imprint apparatus with a regulating surface that limits the vertical range of the holding member's movement, generating heat while pressing against this surface to stabilize temperature and prevent bounce, using a controlling unit to manage current values and fluid refrigeration for temperature adjustment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If the current applied to the actuator is increased to improve driving performance, then the driving performance is improved, but the amount of heat generated by the actuator increases
Solution Approach 1:
The holding member is positioned at a standby position before the imprint process starts, and heat generation is suppressed in advance by controlling the actuator current. This preliminary positioning allows the system to prepare for the upcoming process while avoiding excessive heat buildup that would occur if the actuator were driven at full power from a lower position.
Solution Approach 2:
The system dynamically adjusts the standby position of the holding member based on the amount of heat generated by the actuator. By making the standby position adjustable rather than fixed, the system can optimize the balance between driving performance and heat generation depending on operational conditions.
2Temperature
If the standby position of the holding member is raised to suppress transient temperature phenomena, then temperature stability is improved, but the bounce amplitude increases when power is lost
Solution Approach 1:
The system changes the positional parameter of the holding member dynamically based on operational state. During normal operation, the standby position is raised to suppress temperature transients. When power loss is detected or anticipated, the system lowers the standby position to minimize bounce amplitude, thus adapting to different operational conditions.
Solution Approach 2:
The control unit monitors the operational state and power supply status to determine the appropriate standby position. This feedback mechanism allows the system to adjust the holding member position in response to changing conditions, balancing temperature stability during operation with safety during power loss events.
3Stability of the object's composition
If the holding member is made to wait at a higher standby position to suppress transient phenomena, then temperature variation is reduced, but the risk of mold or substrate damage upon power loss increases
Solution Approach 1:
The standby position is made dynamically adjustable rather than fixed. The control unit changes the standby position based on power supply status and operational state, allowing the system to optimize for temperature stability during normal operation while minimizing damage risk during power loss events.
Solution Approach 2:
The system takes preliminary action by detecting power loss conditions and adjusting the standby position before actual power failure occurs. This preventive adjustment reduces the bounce amplitude and associated damage risk when power is lost, rather than reacting after damage has already occurred.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach stabilizes the holding member's temperature, preventing mold and substrate damage by minimizing transient phenomena and ensuring consistent imprint quality.
Implementation Method 1
the actuator only needs to generate force according to the expansion and contraction of the spring member... the actuator generating heat
Implementation Method 2
The holding member and the base unit are connected via a spring member for holding and compensating (the weight of) the actuator and the holding member
Data Source
AI summary
The present invention provides an imprint apparatus including a holding member configured to hold the mold, a spring member configured to connect the holding member to a base unit that supports the holding member, a driving unit provided between the holding member and the base unit and configured to drive the holding member in a vertical direction with respect to the base unit, and a regulating surface configured to regulate, in a vertical range in which the holding member is driven by the driving unit, a driving end on a side that is towards the base unit, wherein the driving unit performs a driving for pressing the holding member against the regulating surface, and in the driving, generates heat while pressing the holding member against the regulating surface.