Imprint Mold Light Blocking Member Usability Detection
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Solution Overview
Problem
In the imprint technique, protrusion of imprint material beyond the intended pattern region on the substrate leads to defects and mold damage, and the repeated cleaning of molds without distinguishing between imprint material and light blocking members results in deteriorated light blocking performance, affecting the accuracy and throughput of the imprint process.
Innovation Solution
An imprint method that determines the usability of a mold by assessing the state of the light blocking member, specifically its transmittance or contrast, to ensure proper light blocking and prevent curing of excess imprint material, thereby maintaining mold performance and preventing pattern breakage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the mold is cleaned regularly to remove adhering imprint material, then the mold performance is maintained, but the light blocking member is damaged and light blocking performance deteriorates
Solution Approach 1:
The invention separates the light blocking member from the mold structure, allowing it to be removed and replaced independently. This segmentation enables the mold to be cleaned without damaging the light blocking member, as the member can be detached before cleaning and reattached afterward, resolving the contradiction between maintaining mold performance through cleaning and preserving light blocking performance.
Solution Approach 2:
The light blocking member is designed to be movable between attached and removed states. This dynamic configuration allows the system to adapt: the member is attached during imprinting to block light, and removed during cleaning to prevent damage. This dynamic approach enables both regular mold cleaning and preservation of light blocking performance.
2Productivity
If the imprint material protrudes beyond the shot region, then the throughput is improved, but the pattern accuracy deteriorates due to curing of excess material
Solution Approach 1:
The light blocking member acts as an intermediary element positioned between the light source and the protruding imprint material. It selectively blocks light from reaching excess imprint material outside the shot region while allowing light to cure the intended pattern area. This intermediary structure enables high throughput with protruding material without compromising pattern accuracy.
3Ease of operation
If the light blocking member is cleaned together with the mold, then the cleaning process is simplified, but the light blocking member peels or breaks
Solution Approach 1:
By separating the light blocking member from the mold, the invention enables independent handling of each component. The mold can be cleaned without the fragile light blocking member attached, eliminating the risk of peeling or breakage. The light blocking member can be separately maintained or replaced without undergoing the harsh cleaning process.
Solution Approach 2:
The light blocking member is removed before the cleaning process begins. This preliminary action prevents the member from being exposed to cleaning chemicals or mechanical cleaning forces that could cause peeling or breakage. After cleaning, the member is reattached to the mold, ensuring its integrity is preserved.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach prevents the execution of the imprint process with molds having deteriorated light blocking performance, suppressing the curing of imprint material outside the target region and maintaining the integrity of the mold's light blocking effect, ensuring accurate pattern formation and extended mold usability.
Implementation Method 1
a light blocking member provided outside a pattern region of the mold, the light blocking member being configured to block light
Implementation Method 2
The photo-curing method is a method that forms a pattern of an imprint material on a substrate by irradiating the imprint material with light such as ultraviolet light
Data Source
AI summary
The present invention provides an imprint method of forming a pattern of an imprint material on a substrate using a mold, the method including obtaining a state of a light blocking member provided outside a pattern region of the mold, the light blocking member being configured to block light, determining, based on the state of the light blocking member obtained in the obtaining, whether the mold is usable, and curing the imprint material by irradiating the imprint material with the light in a state in which the mold determined to be usable in the determining is in contact with the imprint material on the substrate.