Imprint Mold Dual-Surface Light Shielding for Leakage Control
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Solution Overview
Problem
In optical imprinting, there is a challenge in preventing light leakage from unpatterned regions and adhesion of foreign particles on the transfer layer, which affects the precision and quality of pattern transfer, especially in micro-electromechanical systems and optical parts manufacturing.
Innovation Solution
An imprint mold design featuring a transparent substrate with a first light shielding film along the pattern region's periphery and a second light shielding film on the rear surface, strategically positioned to minimize light incidence and particle adhesion, using opaque materials to control UV light and prevent foreign particle generation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a light shielding film is formed in the unpatterned region to prevent light leakage, then light leakage is prevented, but foreign particles may adhere to the transfer layer through contact with the mold holder
Solution Approach 1:
The patent introduces a second light shielding film on the rear surface (second principal surface) of the imprint mold, creating a three-dimensional light shielding structure. This spatial arrangement allows the light shielding function to be achieved without requiring the front surface light shielding film to contact the mold holder, thus preventing foreign particle adhesion while maintaining light leakage prevention
Solution Approach 2:
The second light shielding film on the rear surface acts as an intermediary element that blocks light from reaching the unpatterned region of the transfer layer. By positioning this light shielding structure on the rear surface rather than the front surface, the patent eliminates direct contact between the light shielding film and the mold holder, thereby preventing foreign particle contamination
2Object-generated harmful factors
If the light shielding film is not formed on the portion held by the mold holder to prevent foreign particles, then foreign particle adhesion is reduced, but light may leak from the gap between the mold holder and light shielding film
Solution Approach 1:
The patent moves the light shielding function to the rear surface of the imprint mold, creating a spatial separation between the light shielding film and the mold holder contact region. This dimensional repositioning allows both light leakage prevention and foreign particle contamination prevention to be achieved simultaneously
Solution Approach 2:
The light shielding function is segmented into two separate locations: the first light shielding film on the front surface and the second light shielding film on the rear surface. This segmentation allows the light shielding function to be achieved without requiring continuous contact between the light shielding film and the mold holder, thereby preventing foreign particle adhesion while maintaining optical isolation
3Manufacturing precision
If a light shielding film is formed to prevent light leakage, then pattern transfer precision is improved, but the device complexity increases due to additional film formation steps
Solution Approach 1:
The rear surface of the imprint mold serves multiple functions: it provides structural support for the mold and simultaneously serves as a mounting surface for the second light shielding film. This multi-functionality reduces the need for additional separate components and simplifies the overall device structure while maintaining pattern transfer precision
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively prevents light leakage from unpatterned regions and suppresses foreign particle adhesion on the transfer layer, ensuring precise pattern transfer and maintaining the integrity of the transfer layer surface.
Implementation Method 1
a first light shielding film provided on the first principal surface, along a periphery of the pattern region; and a second light shielding film provided on the second principal surface
Implementation Method 2
a substrate of transparent material having a first principal surface having the pattern region and a second principal surface opposite to the first principal surface
Implementation Method 3
curing the transfer layer with irradiation of a light
Data Source
AI summary
An imprint mold including a substrate of transparent material having a first principal surface having a pattern region and a second principal surface; a first light shielding film provided on the first principal surface, along a periphery of the pattern region; and a second light shielding film provided on the second principal surface, having an opening including an opposite region to the pattern region, a part of the second light shielding film opposite to the first light shielding film. In a cross section perpendicular to the substrate, the maximum incident angle of the light for curing a transfer layer to the second principal surface is less than an angle between a perpendicular line of the second principal surface and a line connecting an end of the second light shielding film on a side of the opening and a farthest end of the first light shielding film from the pattern region.