Imprint Mold Pattern Compensation for Shrinkage
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Solution Overview
Problem
In imprint processing with condensable gases, the desorption of condensate liquid from the resin after mold release leads to pattern shrinkage, degradation of pattern shape, reduced line widths, and increased surface roughness, compromising accuracy and productivity.
Innovation Solution
A method to determine the mold pattern size by calculating the shrinkage amount of the resin pattern due to condensate liquid desorption, using a processor to adjust the mold size to compensate for shrinkage, ensuring accurate pattern transfer on the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If mold pattern size is increased to compensate for shrinkage, then final pattern accuracy improves, but mold manufacturing complexity increases
Solution Approach 1:
The patent replaces complex mechanical adjustments and trial-and-error mold manufacturing with automated computational processing. The processor automatically calculates the shrinkage amount and determines the compensated mold pattern dimensions, eliminating the need for manual iterative adjustments and reducing manufacturing complexity.
2Productivity
If precise pattern transfer is achieved through shrinkage compensation, then productivity is maintained, but process complexity increases due to additional calculation steps
Solution Approach 1:
The patent applies self-service by enabling the system to automatically calculate and compensate for shrinkage without requiring external intervention or complex manual procedures. The processor autonomously determines the shrinkage amount and adjusts the mold pattern dimensions, making the compensation process as integral and automatic as the imprint processing itself.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances pattern accuracy and maintains productivity by accounting for shrinkage caused by condensate liquid desorption, resulting in improved pattern fidelity and consistency on the substrate.
Implementation Method 1
uses condensable gas that is condensed and liquefied by a pressure rise (compression) occurring when a mold is pressed against a resin in an imprint atmosphere
Implementation Method 2
When the condensable gas is liquefied, the volume is reduced to several hundredth of that produced when the condensable gas remains in gaseous form
Implementation Method 3
the condensate liquid having been absorbed into the resin is desorbed from the resin to the outside after completion of the pressing
Implementation Method 4
the condensate liquid having been absorbed into the resin is desorbed from the resin to the outside after completion of the pressing
Data Source
AI summary
A determination method for determining a pattern of a mold is disclosed. The pattern of the mold is used in imprint processing of forming a pattern on imprint material by performing the steps of pressing the imprint material on a substrate against the pattern of the mold in an atmosphere containing condensable gas to be liquefied due to compression, curing the imprint material, and releasing the mold from the imprint material. A processor calculates a shrinkage amount of the pattern on the imprint material. The pattern on the imprint material shrinks by desorbing condensate liquid, which is produced through liquefaction of the condensable gas between the imprint material and the pattern of the mold in the pressing step and which is dissolved in the imprint material, from the imprint material after completion of the pressing step.