Imprint Mold Release Control via Optical Interference Detection
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing imprint techniques face challenges in accurately evaluating the separation state between a mold and a cured resin on a substrate, leading to potential defects and reduced yield and operating ratio due to improper release conditions, which are difficult to assess with low precision force measurement techniques.
Innovation Solution
An imprint apparatus equipped with a detection unit that analyzes the interference pattern between light reflected by the mold and substrate to determine the separation state, using a moving unit to widen the interval between the mold and substrate, and a processing unit to obtain information on the separation state, ensuring proper release and reducing adhesion through a surfactant application.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If force measurement technique is used to estimate separation state, then release control is achieved, but measurement precision is low and threshold setting is difficult
Solution Approach 1:
The patent replaces the mechanical force measurement system with an optical detection system. The detection unit uses light reflection from the mold and substrate to capture interference patterns, which are processed to determine the separation state. This substitution eliminates the need for force sensors and complex threshold setting, achieving high-precision non-contact measurement.
Solution Approach 2:
The patent introduces light as an intermediary to detect the separation state. By analyzing the interference pattern of reflected light, the system indirectly determines the gap between mold and substrate without direct mechanical contact. This intermediary approach enables precise measurement while avoiding the limitations of direct force measurement.
2Ease of operation
If transparent mold is used for photo-curing method, then alignment mark observation is enabled, but adhesion between mold and resin increases making release difficult
Solution Approach 1:
The patent applies a release agent to the mold surface before the imprinting process. This preliminary action creates a low-adhesion layer that prevents resin from bonding to the mold during curing, enabling easy separation afterward while maintaining the transparent mold's alignment observation capability.
Solution Approach 2:
The release agent acts as an intermediary substance between the mold and resin. It reduces the surface energy and adhesion forces at the interface, allowing the transparent mold to maintain its optical properties for alignment observation while preventing harmful adhesion to the resin during the curing process.
3Object-affected harmful factors
If release agent is applied to reduce adhesion, then mold release is improved, but abnormal release conditions still occur affecting yield
Solution Approach 1:
The patent implements a feedback control system that continuously monitors the separation state through optical detection during the release process. The detection unit captures interference patterns, and the control unit adjusts release parameters in real-time based on this feedback, ensuring consistent and reliable mold separation while minimizing abnormal release conditions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for precise evaluation of the separation state, preventing defects and improving the yield and operating ratio by ensuring proper mold release, and enabling real-time control to maintain optimal separation conditions.
Implementation Method 1
a detection unit configured to detect a pattern of light reflected by the mold and light reflected by the substrate
Data Source
AI summary
The present invention provides an imprint apparatus which forms a relief pattern in an imprint material on a substrate using a mold, the apparatus including a curing unit configured to cure the imprint material, a moving unit configured to relatively move the mold and the substrate, a detection unit configured to detect a pattern of light reflected by the mold and light reflected by the substrate, and a processing unit configured to obtain information on a separation state of the mold and the cured imprint material on the substrate based on the pattern detected by the detection unit while separating the mold from the imprint material by widening, using the moving unit, an interval between the mold and the substrate.