Imprint Mold Channels for Resin Flow Control
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Solution Overview
Problem
Existing mold designs for imprinting patterns in resist materials used in integrated circuit manufacturing face challenges in controlling the expansion and flow of resin, leading to inconsistent pattern transfer and potential resin overflow due to the lack of efficient channels for resin flow between pattern regions.
Innovation Solution
A mold design featuring channels that extend from the first region to the second region, allowing the resin to flow and fill the second region pattern effectively, thereby controlling the expansion and flow of the resin and ensuring reliable pattern transfer without overflow.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If resin is applied to the substrate without channels in the mold, then the mold structure is simple, but the resin expansion and flow control is poor leading to inconsistent pattern transfer and potential overflow
Solution Approach 1:
The mold base is segmented into multiple functional regions: a first region containing the first concave pattern, a second region containing the second concave pattern, and channels connecting these regions. This segmentation allows independent control of resin flow to different pattern regions while maintaining overall mold functionality.
Solution Approach 2:
Channels are introduced as intermediary structures between the first and second regions. These channels serve as mediators that control resin flow from the first region to the second region, enabling reliable pattern transfer without requiring complex boundary conditions or additional resistive elements.
2Manufacturing precision
If channels are added to control resin flow from first region to second region, then resin flow control is improved, but the mold structure becomes more complex
Solution Approach 1:
The mold exhibits local quality variations through different concave pattern depths in the first and second regions. The first concave pattern has a first depth while the second concave pattern has a second depth, creating localized resin flow characteristics that enhance filling precision without requiring complex channel networks throughout the entire mold.
Solution Approach 2:
The channels extend in the thickness direction (Z-direction) from the first region to the second region, utilizing the vertical dimension to control resin flow. This dimensional approach allows precise control of resin advancement without adding lateral complexity to the mold structure.
3Manufacturing precision
If increased resin amount is used to ensure complete pattern filling, then pattern filling is improved, but resin overflow occurs
Solution Approach 1:
The channel structure provides implicit feedback control for resin flow. As resin advances through the channels from the first region to the second region, the system automatically adjusts flow distribution based on the channel geometry and resistance, preventing both incomplete filling and overflow without requiring external control mechanisms.
Solution Approach 2:
The channels act as intermediary flow control elements that regulate resin quantity distribution. By controlling the cross-sectional area and length of the channels, the system precisely manages resin flow to the second region, ensuring complete pattern filling while preventing excess resin that would cause overflow.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The mold design ensures accurate and reliable filling of patterns in the second region by controlling the resin flow through strategically positioned channels, eliminating the need for increased resin amounts and preventing overflow, thus enhancing the reliability of pattern transfer in integrated circuit manufacturing.
Implementation Method 1
channels extending from the first region to the second region, allowing the resin to flow and fill the second region pattern effectively
Implementation Method 2
controlling the expansion and flow of the resin
Implementation Method 3
light is applied to harden the resin
Data Source
AI summary
According to one embodiment, a mold includes a base, a first concave pattern, a second concave pattern, and a third concave pattern. The base includes a first surface and a pedestal projecting from the first surface. The pedestal includes a first region and a second region disposed outside the first region. The first concave pattern is formed in the first region. The second concave pattern is formed in the second region. The third concave pattern extends from the first region to the second region.