Imprint Mold Suction Force Adjustment for Alignment
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Solution Overview
Problem
Conventional imprint apparatuses face challenges in efficient alignment processing and shape correction of molds due to fixed retention methods, which hinder deformation and alignment accuracy, especially when using global alignment methods.
Innovation Solution
The imprint apparatus employs a suction unit with adjustable suction force and a shape correcting unit that applies force to the mold, allowing for precise alignment and deformation by configuring a predetermined suction region and reducing suction force in other areas, enabling efficient mold alignment and shape correction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If constant fixed retention of the mold is executed using the holding unit, then the mold is securely held, but the mold resists deformation when external force is applied
Solution Approach 1:
The suction force is dynamically adjusted during the process: initially set to a first value for secure retention during alignment, then changed to a second value (lower than the first) to enable efficient deformation. This dynamic adjustment resolves the contradiction between stable retention and deformation efficiency.
Solution Approach 2:
The alignment process is performed first while the suction force is at the first (higher) value to ensure accurate positioning. After alignment is complete, the suction force is reduced to the second value to enable deformation. This preliminary alignment action ensures that deformation does not compromise alignment accuracy.
2Ease of manufacture
If the retention position of the mold is changed to improve deformation efficiency, then the mold can be deformed more easily, but the alignment reference value becomes invalid
Solution Approach 1:
The suction force magnitude is dynamically changed between two distinct values: a first value during alignment that provides sufficient retention to prevent position changes, and a second value during deformation that is lower to enable efficient deformation. This dynamic adjustment allows the system to maintain retention position stability during alignment while enabling efficient deformation afterward.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the efficiency of alignment processing and mold shape correction, allowing for improved throughput and accuracy by facilitating mold deformation without altering the retention position, enabling effective global alignment.
Implementation Method 1
a holding unit configured to hold the mold by use of a suction unit including a plurality of suction force generating portions
Implementation Method 2
a shape correcting unit configured to align a shape of a pattern region of the mold with a shape of a substrate-side pattern region of the substrate by applying force to the mold
Implementation Method 3
A resin pattern is formed on the substrate by release after irradiation with UV radiation to cure the resin
Data Source
AI summary
An imprint apparatus forms a pattern of an imprint material on a substrate with a mold. A holding unit holds the mold by attracting a first surface that is opposite to a second surface on which the pattern is formed, of the mold, with a suction unit. A suction force adjusting unit adjusts a suction force. A shape correcting unit applies a force to a lateral surface of the mold, such that a shape of a pattern region of the mold gets closer to a shape of a substrate-side pattern region of the substrate. The first mold surface includes first and second regions, the second region being closer to a center of the mold from the lateral surface than the first region. The suction force adjusting unit adjusts the suction force so that a suction force of the first region is lower than that of the second region.