Imprint Mold Deformation Control via Thickness-Adjusted Force
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Solution Overview
Problem
In imprint techniques for nano-lithography, variations in mold thickness due to manufacturing errors lead to inconsistent pattern deformation and shape transfer across molds, resulting in dimension and shape variations on substrates.
Innovation Solution
An imprint apparatus with a control system that adjusts the force applied to each mold based on its thickness, using a deforming unit to control pressure in a chamber attached to the mold, ensuring the pattern surface bulges appropriately to maintain pattern accuracy and prevent loss during transfer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a predetermined force is applied to each mold in a mold deforming operation, then the mold deforming operation can be simplified, but the deformation amount of each mold varies due to thickness variations, resulting in pattern dimension and shape variations
Solution Approach 1:
The patent applies parameter changes by adjusting the force magnitude applied to each mold based on its specific thickness. Instead of using a fixed predetermined force for all molds, the system varies the force parameter according to the actual thickness of each mold, thereby compensating for thickness variations and achieving consistent deformation amounts and pattern quality across all molds.
2Manufacturing precision
If the thickness of each mold is measured and force is adjusted accordingly, then pattern transfer accuracy is improved, but the operation complexity increases
Solution Approach 1:
The patent implements feedback by measuring the actual thickness of each mold and using this information to adjust the force applied during the deforming operation. The control system receives thickness data, calculates the appropriate force based on the relationship between thickness and deformation, and applies the adjusted force to each mold, creating a closed-loop control system that ensures consistent pattern transfer accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach ensures consistent pattern transfer across molds with varying thicknesses, minimizing shape and dimension variations and preventing air bubble entrapment, thereby enhancing pattern reproduction accuracy and quality.
Implementation Method 1
a deforming unit that applies force to the mold so that the pattern surface has a target shape
Implementation Method 2
a chamber that holds the mold, wherein the chamber has a negative pressure
Data Source
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AI summary
The present invention provides an imprint apparatus which performs an imprint process of transferring a pattern onto a substrate, the apparatus comprising a deforming unit configured to deform the pattern surface by applying a force to the mold, an obtaining unit configured to obtain thickness information of the mold, a calculation unit configured to calculate a force to be applied to the mold based on the thickness information of the mold obtained by the obtaining unit, so that the pattern surface has a target shape in the imprint process, and a control unit configured to control the deforming unit to apply the force calculated by the calculation unit to the mold in the imprint process.