Imprint Mold Pattern Volume Correction Using Test Mold Feedback
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Solution Overview
Problem
The challenge in accurately forming patterns on substrates using molds in imprint techniques arises due to discrepancies between the actual and design volumes of concave pattern elements, which are often caused by fabrication processes.
Innovation Solution
A method involving an information processing apparatus to correct mold design data by determining and applying correction values based on the actual volumes of concave pattern elements, using a measurement apparatus to measure the dimensions and areas of test molds, and adjusting the design data to minimize volume errors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a mold is fabricated using conventional fabrication processes, then the mold can be manufactured, but the actual volume of concave pattern elements deviates from the design volume due to fabrication process variations
Solution Approach 1:
The patent applies preliminary action by measuring the actual volume of concave pattern elements in a test mold before the main fabrication process. This allows the determination of correction values in advance, which are then used to adjust the design data of subsequent molds, ensuring volume accuracy is achieved through pre-correction rather than post-correction
Solution Approach 2:
The patent changes the design parameters (dimensional data) of concave pattern elements based on measured actual volumes. By calculating correction values that compensate for fabrication process variations and applying these corrections to the design data, the patent adjusts the parameters to achieve the target volume accuracy in the final molded product
2Manufacturing precision
If design data of a mold is corrected to achieve accurate pattern formation, then manufacturing precision improves, but the complexity of the data processing increases
Solution Approach 1:
The patent uses a test mold as a copy or representative sample of the actual fabrication process outcomes. By measuring the test mold and deriving correction values from it, the patent avoids the need to measure and correct every individual pattern element in the final mold, thereby reducing the overall complexity of the correction process while maintaining precision
Solution Approach 2:
The patent implements feedback by measuring the actual volume of pattern elements and using this information to correct the design data. This closed-loop approach ensures that the correction values are based on actual fabrication results, allowing the system to learn from real measurements and adjust future designs accordingly, improving precision while keeping the process manageable
Data Source
AI summary
The present disclosure provides a correction method of correcting, by an information processing apparatus, design data of a pattern of a mold to be used in an imprint process of forming a pattern in an imprint material on a substrate, comprising: obtaining an actual volume of a concave pattern element formed in a test mold; determining a correction value for correcting a difference between the actual volume and a design volume of the pattern element by a dimension of the pattern element in a plane direction parallel to a surface of the test mold; and correcting the design data based on the correction value.