Imprint Apparatus Nozzle Ejection Timing Control
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Solution Overview
Problem
The existing imprint apparatuses face challenges in achieving high landing accuracy for resin ejection onto substrates, leading to decreased semiconductor chip yield due to resin peeling off from mold side surfaces during the imprinting process, as the ejection timing correction range for nozzles is insufficient.
Innovation Solution
An imprint apparatus with a determination unit to assess relative ejection timing of abnormal nozzles compared to normal nozzles, and a control unit to synchronize the substrate stage and ejection unit based on determined ejection timings, allowing for precise adjustment of ejection timing to correct deviations and ensure accurate resin placement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the ejection timing is shifted to correct landing position deviations, then the landing accuracy is improved, but the correction range is insufficient for abnormal nozzles
Solution Approach 1:
The system dynamically adjusts the ejection timing for each nozzle based on its measured landing position deviation. The determination unit calculates individual timing corrections for abnormal nozzles, and the control unit applies these dynamic adjustments to the ejection timing, enabling the system to adapt to varying degrees of deviation across different nozzles and achieve sufficient correction within the available timing shift range.
2Manufacturing precision
If the synchronization timing between substrate stage and ejection unit is adjusted, then the landing accuracy is improved, but the complexity of control increases
Solution Approach 1:
The control system segments the ejection timing adjustment by nozzle, with the determination unit calculating individual timing corrections for each abnormal nozzle based on its landing position deviation. The control unit then applies these segmented timing adjustments independently to each nozzle's ejection timing, managing the complexity through systematic division of correction tasks while achieving high landing accuracy.
Solution Approach 2:
The system uses feedback from measured landing positions to determine and adjust ejection timing. The determination unit receives landing position information, calculates the required timing correction, and the control unit applies this feedback-based adjustment to synchronize ejection timing with substrate movement, improving landing accuracy through closed-loop control.
Data Source
AI summary
An imprint apparatus includes: a substrate stage configured to move a substrate; an ejection unit including a plurality of nozzles and configured to eject an ejection material from the nozzles onto the substrate in synchronization with movement of the substrate stage; and a mold driving mechanism configured to drive a mold on which a pattern is formed to press down the mold onto the substrate. The imprint apparatus determines a relative ejection timing of an abnormal nozzle with respect to a normal nozzle based on ejection properties of the nozzles and a moving direction of the substrate stage, determines an ejection timing of the normal nozzle based on the determined relative ejection timing, and controls a synchronization timing of the substrate stage and the ejection unit based on the determined ejection timing of the normal nozzle.