Imprint Apparatus Peeling Defect Detection via Pressure Sensing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing methods for detecting defects in fine patterns on substrates, such as those used in thin display devices, are inefficient and difficult to precisely check, especially for nano-sized patterns, as they rely on CCD cameras which may not provide accurate quality control.
Innovation Solution
An imprint apparatus equipped with a pressure roller, idle roller, pressure sensor, and controller that detects peeling defects by comparing pressures and adjusts peeling angle and tension to ensure precise defect detection and quality inspection without additional equipment like CCD cameras.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a CCD camera is used to detect defects in fine patterns, then the inspection method is simple and equipment is available, but the measurement precision is insufficient for nano-sized patterns
Solution Approach 1:
The patent replaces the optical detection system (CCD camera) with a mechanical detection system using pressure sensors mounted on rollers. The pressure sensors detect peeling defects through mechanical contact and pressure measurements during the film peeling process, providing sufficient precision for nano-sized patterns while avoiding the limitations of optical microscopy.
2Reliability
If additional inspection equipment like CCD cameras is added, then defect detection capability is improved, but device complexity increases
Solution Approach 1:
The patent integrates defect detection functionality into the existing peeling mechanism by mounting pressure sensors on the rollers that are already part of the film handling system. The rollers serve dual purposes: peeling the film from the substrate and detecting peeling defects through pressure measurements, eliminating the need for separate inspection equipment.
Solution Approach 2:
The detection system uses the existing mechanical motion and forces of the peeling process itself to generate detection signals. The pressure sensors detect abnormalities in the peeling force, allowing the system to self-diagnose defects without requiring external inspection equipment or additional energy input.
3Productivity
If peeling speed is increased to improve productivity, then manufacturing efficiency is improved, but defect detection accuracy decreases
Solution Approach 1:
The patent performs defect detection during the peeling process itself rather than after peeling is complete. The pressure sensors continuously monitor peeling forces in real-time, allowing defects to be detected while the film is being peeled, thus maintaining detection accuracy even at higher peeling speeds.
Solution Approach 2:
The pressure sensors provide real-time feedback on peeling forces, allowing the system to detect abnormalities as they occur during the peeling process. This continuous feedback mechanism enables accurate defect detection regardless of peeling speed, as the detection is tied to the actual peeling action rather than post-processing inspection.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus efficiently detects peeling defects and improves manufacturing efficiency by using pressure sensors to monitor and adjust peeling forces, ensuring high-quality fine pattern formation on substrates without the need for additional inspection tools.
Implementation Method 1
a pressure sensor connected to the pressure roller and configured to sense a first pressure applied to the pressure roller
Data Source
AI summary
An imprint apparatus includes: a pressure roller configured to press a film onto a substrate; an idle roller spaced from the pressure roller, the idle roller and pressure roller being configured to peel the film from the substrate; a pressure sensor connected to the pressure roller and configured to sense a first pressure applied to the pressure roller; and a controller configured to detect a peeling defect based on the first pressure.