Imprint Apparatus Scanning UV Curing for Mold Pattern Reliability
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Solution Overview
Problem
The existing imprint techniques face challenges in preventing ultraviolet light emission outside the protruding portions of molds, leading to pattern failures and mold breakage, especially when the shape of the protruding portions changes, requiring custom mask plates for each shape, which is impractical.
Innovation Solution
An imprint apparatus with a mold holder, substrate holder, driver, first illuminator, and a scanning light illuminator, controlled by a controller to precisely manage light exposure, using a masking blade to limit UV light emission to specific regions and a scanning light to cure the imprint material effectively, regardless of the shape of the protruding portion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a mask plate is used to limit UV light emission to match the protruding portion shape, then UV light emission outside the target region is prevented, but the device complexity increases and requires custom mask plates for each protruding portion shape change
Solution Approach 1:
The masking blade is designed with a universal function to adapt to different protruding portion shapes without requiring custom mask plates. The blade can be positioned and adjusted to match various pattern shapes, making it applicable across multiple mold configurations and protruding portion geometries, thereby eliminating the need for shape-specific mask plates.
Solution Approach 2:
The patent replaces the static mask plate system with a dynamic masking blade system that can be mechanically adjusted. Instead of using fixed mask plates that require replacement or reconfiguration when protruding portion shapes change, the masking blade can be repositioned and adjusted to match different shapes, substituting a flexible mechanical adjustment system for a rigid fixed-mask system.
2Productivity
If the entire substrate surface is irradiated with UV light, then curing is fast, but imprint material outside the protruding portion cures and causes pattern failure or mold breakage
Solution Approach 1:
The illuminator is designed to provide localized UV light irradiation that precisely matches the shape and position of the protruding portion. Instead of uniform illumination across the entire substrate, the light is concentrated only on the regions where imprint material should be cured, ensuring that curing occurs locally at the target pattern areas while leaving surrounding areas uncured and flexible for proper pattern formation.
3Manufacturing precision
If pressing force is applied to fill minute portions with imprint material, then pattern filling is complete, but imprint material sticks out to side surfaces and causes foreign substance contamination
Solution Approach 1:
The system performs preliminary localized curing of the imprint material at the protruding portion regions before complete pressing is finalized. By curing the imprint material in the target pattern areas early in the process, the material is fixed in place and prevented from sticking out to side surfaces during subsequent pressing operations, thereby eliminating foreign substance contamination while maintaining complete pattern filling.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for reliable pattern formation on substrates by preventing UV light emission outside the intended areas, even when the mold shape changes, ensuring high reliability and adaptability without the need for custom mask plates for each shape.
Implementation Method 1
the imprint material is irradiated with, for example, ultraviolet (UV) light, thereby curing the imprint material
Implementation Method 2
a second illuminator including a scanner configured to scan beam-like light for curing the composition
Data Source
AI summary
An imprint apparatus that performs an imprint process for bringing a protruding portion of a mold into contact with a composition on a substrate is provided. The apparatus comprises a first illuminator configured to emit light for curing the composition, a second illuminator including a scanner configured to scan beam-like light for curing the composition, and a controller configured to control exposure such that in a state where the composition and the protruding portion are in contact with each other, the light from the first illuminator is emitted to the composition at a position corresponding to a first region of the protruding portion, and control the scanner such that the light from the second illuminator is emitted to the composition at a position corresponding to a second region different from the first region of the protruding portion.