Imprint Apparatus Scanning Sensor for Pattern Detection
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Solution Overview
Problem
Existing imprint apparatuses face challenges in accurately detecting foreign particles and ensuring sufficient filling of the mold pattern with imprint material, leading to insufficient detection accuracy and reduced throughput due to the limited field of view of the observation unit.
Innovation Solution
The apparatus incorporates an image sensing unit that scans the imprint material while in contact with the mold, allowing for precise detection of foreign particles and pattern filling status through a control unit that processes images obtained during the imprint process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If the camera is configured such that the entire pattern region of the mold falls within the field of view, then the observation coverage is sufficient, but the image of the imprint material in the peripheral portion is sensed obliquely resulting in insufficient detection accuracy
Solution Approach 1:
The patent divides the single wide-field observation into multiple narrow-field observations by scanning the image sensing unit across different positions. Each position captures a specific region with high precision, and the control unit aggregates these segmented views to achieve both comprehensive coverage and accurate detection throughout the entire pattern region.
Solution Approach 2:
The patent transforms the static camera configuration into a dynamic scanning system. The image sensing unit is scanned in a predetermined manner across multiple positions, allowing the system to adapt its observation position dynamically. This enables the camera to maintain optimal imaging geometry for each region while covering the entire pattern area, resolving the contradiction between field of view coverage and detection accuracy.
2Measurement precision
If the image sensing unit is scanned to improve detection accuracy, then the detection precision improves, but the measurement time increases reducing throughput
Solution Approach 1:
The patent implements continuous scanning of the image sensing unit across multiple positions during the imprint process. Rather than discrete intermittent measurements, the scanning occurs continuously as part of the normal imaging operation. This allows high-precision detection to be performed without interrupting the manufacturing flow, maintaining throughput while achieving accurate detection of foreign particles and pattern filling status throughout the entire pattern region.
Data Source
AI summary
The present invention provides an imprint apparatus which forms a pattern of an imprint material on a substrate by using a mold, the apparatus comprising an image sensing unit configured to sense an image of the imprint material via the mold, and a control unit configured to, in a state in which the mold and the imprint material are in contact with each other, cause the image sensing unit to sense the image of the imprint material while scanning the image sensing unit and obtain information on forming of the pattern of the imprint material based on the image obtained by the image sensing unit.