Imprint Apparatus Shearing Force Control for Overlay Accuracy
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Solution Overview
Problem
Conventional imprint techniques struggle to maintain overlay accuracy between a mold and a substrate due to the influence of small surface unevenness, underlying pattern depth, and residual film thickness of the imprint material.
Innovation Solution
An imprint apparatus that includes an obtainment unit to gather information on the geometric shape of the surface pattern, thickness of the layer, film thickness of the imprint material, and the shearing force generated, and a control unit to calculate and achieve a target film thickness for optimal shearing force, thereby improving overlay accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the residual film thickness of the imprint material is increased, then the shearing force decreases, but relative vibration between the mold and substrate increases causing degradation of overlay accuracy
Solution Approach 1:
The invention changes the physical parameters of the imprint material by controlling its residual film thickness to an optimal range. By adjusting this parameter, the shearing force is optimized to provide sufficient friction for preventing mold-substrate relative vibration while maintaining appropriate flow characteristics for complete pattern filling, thereby resolving the contradiction between strength and manufacturing precision.
2Strength
If the residual film thickness of the imprint material is decreased, then the shearing force increases, but distortion of the mold occurs causing degradation of overlay accuracy
Solution Approach 1:
The invention optimizes the residual film thickness parameter to balance shearing force generation with mold stability. By maintaining the film thickness within a specific range, sufficient shearing force is generated to drive pattern filling while preventing excessive force that would cause mold distortion, thus resolving the contradiction between strength and stability.
3Manufacturing precision
If the depth of underlying pattern and thickness of underlying layer are not controlled, then the shearing force becomes unpredictable, but overlay accuracy degrades due to insufficient control of imprint material behavior
Solution Approach 1:
The invention identifies and controls key parameters including the depth of the underlying pattern and the thickness of the underlying layer. By establishing specific ranges for these parameters along with residual film thickness, the shearing force becomes predictable and controllable, enabling consistent overlay accuracy without requiring overly complex process control systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively suppresses degradation of overlay accuracy by generating an appropriate shearing force in the imprint material, enhancing the alignment and pattern transfer precision between the mold and the substrate.
Implementation Method 1
a shearing force generated in the imprint material in a state in which the mold is in contact with the imprint material on the substrate
Implementation Method 2
The photo-curing method is a method of curing an imprint material by irradiating it with light (such as ultraviolet light) while the imprint material arranged on a substrate is in contact with a mold
Data Source
AI summary
An imprint apparatus for forming, by using a mold, a pattern of an imprint material on a layer formed on a surface pattern existing in a substrate, the apparatus including a calculation unit configured to output, based on information indicating a relationship among a geometric shape of the surface pattern, a thickness of the layer, a film thickness of the imprint material existing between the mold and the layer in a state in which the mold is in contact with the imprint material, and a shearing force generated in the imprint material in the state, a target film thickness of the imprint material required for generating the target shearing force in the imprint material, if the geometric shape of the surface pattern, the thickness of the layer, and a target shearing force are input.