Imprint Shot Region Grouping for Continuous Material Supply
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional imprint apparatuses lack the functionality to edit and manage groups of shot regions where imprint material is continuously supplied, limiting the degree of freedom in operation.
Innovation Solution
An imprint apparatus with a user interface that allows users to assign shot regions to groups for continuous material supply from a dispenser, enabling advanced editing and processing capabilities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a conventional imprint apparatus operates without group editing functionality, then the device structure remains simple, but the operational flexibility and control capability are limited
Solution Approach 1:
The patent segments shot regions into editable groups that can be independently managed and controlled. The user interface divides the substrate into multiple shot regions and allows grouping them based on continuous material supply requirements, enabling flexible operational control without complicating the overall device structure
Solution Approach 2:
The user interface acts as an intermediary between the operator and the imprint apparatus control system. It provides group editing functionality that mediates between simple operation and complex control requirements, allowing users to manage shot regions through an intuitive interface without directly complicating the hardware architecture
2Productivity
If shot regions are processed individually without continuous material supply management, then the control system remains simple, but the imprint material distribution efficiency decreases
Solution Approach 1:
The system performs preliminary grouping of shot regions based on continuous material supply requirements before the actual imprint process. The user interface allows pre-configuration of groups, so that when processing begins, the apparatus can efficiently manage material distribution across multiple shot regions without real-time decision complexity
Solution Approach 2:
The control system dynamically manages shot region groups based on user-defined configurations. The system can adaptively control which shot regions receive continuous material supply based on the grouped arrangements, enabling efficient material distribution while maintaining flexible control that responds to different processing scenarios
Data Source
AI summary
An imprint apparatus that forms a pattern made of an imprint material on each of a plurality of shot regions of a substrate, includes a user interface configured to allow a user to perform editing for assigning each of the plurality of shot regions to any one of a plurality of groups such that each of the plurality of groups is formed by at least one shot region onto which the imprint material is continuously supplied from a dispenser.