Imprint Template Demolding via Cooling-Liquid Hardening
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Solution Overview
Problem
The existing nanoimprint lithography processes are time-consuming due to the need for controlled thermal cycling and complex temperature control, which can cause damage to brittle materials and fine-scale structures during cooling and dismantling.
Innovation Solution
A method involving a sandwich arrangement of a template and substrate, where heating is applied to soften the moldable layer, followed by immediate immersion in a cooling liquid to harden the layer, and then separating the template from the substrate, eliminating the need for thermal cycling and complex cooling systems.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If controlled thermal cycling and complex temperature control are used, then the molding layer can be properly softened and hardened, but the process time increases and the complexity of the tool design increases
Solution Approach 1:
The patent extracts the cooling function from the imprint machine by using an external cooling liquid bath. The sandwich structure is removed from the machine and immersed in the cooling liquid, eliminating the need for integrated thermal cycling systems and reducing process time while maintaining proper hardening of the molding layer.
Solution Approach 2:
The patent introduces a cooling liquid as an intermediary medium to transfer heat from the sandwich structure. The cooling liquid acts as a mediator between the hot sandwich structure and the environment, enabling rapid and controlled cooling without complex thermal management systems in the imprint machine.
2Reliability
If controlled thermal cycling and complex temperature control are used, then the molding layer can be properly softened and hardened, but the complexity of the tool design increases
Solution Approach 1:
The patent removes the cooling system from the imprint machine design, extracting this function to an external process step. This eliminates the need for complex integrated thermal management systems, reducing device complexity while maintaining reliable softening and hardening of the molding layer.
Solution Approach 2:
The cooling liquid serves as an intermediary that simplifies the tool design by providing a straightforward external cooling mechanism. This mediator enables effective heat removal without requiring complex internal cooling channels or thermal control systems within the imprint machine.
3Reliability
If the sandwich arrangement is allowed to cool down before dismantling, then damage to brittle materials and fine-scale structures is prevented, but the process time increases
Solution Approach 1:
The patent rushes through the cooling process by immersing the sandwich structure directly into a cooling liquid bath, achieving rapid cooling that both protects brittle materials and minimizes cooling time. This approach skips the lengthy controlled cooling period while still preventing damage through effective temperature reduction.
Solution Approach 2:
The patent utilizes the phase transition properties of the cooling liquid to achieve rapid heat extraction. The large temperature difference between the hot sandwich structure and the cool liquid creates efficient heat transfer, quickly transitioning the molding layer from a soft state to a hardened state while protecting fine-scale structures.
4Productivity
If the sandwich arrangement is handled at elevated molding step temperature, then the imprinting process can be completed, but damage to the moldable layer occurs
Solution Approach 1:
The patent performs preliminary cooling by immersing the sandwich structure in a cooling liquid bath before the dismantling step. This preliminary action reduces the temperature of the moldable layer to a safe level, preventing damage during subsequent handling and template removal while maintaining productivity.
Solution Approach 2:
The patent rushes through the cooling process using a cooling liquid bath, quickly reducing the temperature of the moldable layer from the elevated imprinting temperature to a safe handling temperature. This rapid temperature reduction prevents damage while maintaining efficient process completion.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method reduces process time, simplifies tool design, and enhances process robustness, making it suitable for high-volume manufacturing with reduced pressure demands and simplified machine designs.
Implementation Method 1
applying heat to soften a molding layer on the substrate surface
Implementation Method 2
submerging the sandwich arrangement in a cooling liquid to harden the molding layer
Data Source
AI summary
A method for facilitating demolding of a substrate from an imprint template, the method comprising: providing (S510) the template and the substrate in a sandwich arrangement with a structured surface of the template in contact with a target surface of the substrate; applying heat (S520) to soften a molding layer on the target surface, wherein said molding layer is a thermoplastic material having a minimum glass transition temperature, Tg>50° C. and Young's modulus>1000 MPa, and wherein the molding layer is heated above Tg; pressing (S530) the sandwich arrangement together to imprint a pattern of the structured surface into the heated molding layer; submerging (S550) the sandwich arrangement in a cooling liquid to harden the molding layer; and separating (S560) the template from the patterned substrate.