Imprint Template Cover Preventing Contamination
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Solution Overview
Problem
Existing imprint lithography techniques face challenges in maintaining the cleanliness of imprint templates when mounted on holders, as common cleaning methods can damage the holder's materials, leading to contamination of the pattern features.
Innovation Solution
An imprint template cover that extends around the pattern features without contacting them, using a vacuum seal or adhesive to attach to the template, preventing contamination during mounting and handling, and allowing for prolonged use without repetitive cleaning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If common cleaning methods (e.g., H2SO4/H2O2 bath) are used to clean the imprint template, then the template is cleaned effectively, but the template holder materials are damaged
Solution Approach 1:
The patent divides the template assembly into two separate components: the imprint template and the template holder. By segmenting these elements, the cleaning process can be applied selectively to the template without affecting the holder, thus resolving the contradiction between achieving template cleanliness and preserving holder integrity
Solution Approach 2:
The patent introduces an intermediary structure (the separate template holder) that mediates between the cleaning process and the holder materials. This intermediary allows the template to be cleaned rigorously while the holder remains protected from direct exposure to harsh cleaning chemicals
2Ease of operation
If the imprint template is mounted on a holder for handling, then ease of operation is improved, but contamination of pattern features occurs during mounting
Solution Approach 1:
The patent applies preliminary protective action by coating the pattern features with a release agent before mounting the template on the holder. This preliminary step prevents contamination from occurring during the subsequent mounting and handling operations, allowing ease of operation without compromising pattern feature cleanliness
Solution Approach 2:
The release agent acts as an intermediary substance between the pattern features and the holder/environment during mounting. This intermediary layer prevents direct contact and potential contamination while allowing the template to be securely mounted and handled
3Manufacturing precision
If repetitive cleaning is performed to maintain template cleanliness, then pattern feature purity is maintained, but processing time and complexity increase
Solution Approach 1:
The patent performs preliminary protective measures (coating with release agent, using protective covers) before the imprinting process begins. This preliminary action prevents contamination in the first place, eliminating the need for repetitive cleaning cycles and reducing overall processing time while maintaining pattern feature purity
Solution Approach 2:
The patent implements beforehand protective measures such as using protective covers over the pattern features and applying release agents. These cushioning measures prevent contamination before it can occur, thereby eliminating the need for subsequent cleaning operations and reducing total process time
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The cover effectively prevents contamination of the pattern features, reducing the need for rigorous cleaning processes that might damage the template holder's materials, ensuring accurate and consistent pattern application while maintaining the integrity of the template.
Implementation Method 1
using a vacuum seal or adhesive to attach to the template
Implementation Method 2
using a vacuum seal or adhesive to attach to the template
Data Source
AI summary
An imprint template cover for an imprint template having a pattern feature thereon. The cover is configured such that, in use, it extends around the pattern feature of the imprint template, and such that the cover does not contact the pattern feature.